Ultraprecise Nanopositioners
piezo based nanopositioners for ultra clean environment
Due to the need of highest accuracy in the semiconductor market, attocube combines its superior precision positioning technology with unrivaled compact and low-particle generating design to fit in any high complex system. Moreover attocube’s nanopositioners offer flexible stacking for motion with multiple degrees of freedom suitable for a wide range of extreme environments.
Extreme environments
attocube‘s nano drives meet the challenge of precise positioning systems, reliably working under extreme environmental conditions. Suitable models are available for high temperature, high and ultra high vacuum.
- UHV pressure down to 5 x 10-11 mbar
- high temperatures up to 100°C
Compact, precise & powerful
attocube‘s positioners employ a powerful and precise nano drive in a compact frame for easy integration into customer setups.
- footprint from 15 x 15 mm2
- dynamic Force up to 8 N
- resolution down to 1 nm
Flexible positioning
attocube‘s positioners can be stacked to multiaxis devices with up to 6 degrees of freedom.
Get more info here: attocube nanopositioners