https://www.atonarp.com/atonarp-news/atonarps-aston-impact-metrology-platform-starts-volume-shipments-to-semiconductor-fabs-in-korea
Atonarp, the leader in in-situ, real-time high-sensitivity metrology for semiconductor process control, announces worldwide release for sale of its Aston platform. This marks an important milestone in the Company’s transition to a commercial organization on a worldwide scale.
Aston is a compact mass spectrometer that provides accurate, real-time data on the process chemistry with sensitivity to measure the molecular concentrations down-to parts per billion. This data enables semiconductor manufacturing FABs to run more efficiently, thus increasing the yield and throughput, delivering dramatic financial benefits to FAB operators.
Atonarp is shipping production orders of Aston Impact to leading semiconductor FABs and equipment manufacturers in Korea and the USA. It is also shipping dozens of Aston units for clients’ evaluations in their advanced processes to optimize their process and manufacturing efficiencies.
Aston provides actionable data for advanced semiconductor applications such as atomic level deposition (ALD) and sub-fab operations. At less than nine parts per billion square root of Hertz (9ppb√Hz),Aston offers up to ten times better sensitivity than competitors' solutions, without compromising on the speed at which data can be gathered.