COBRA BC 1000/2000 F - Dry screw vacuum pumps
High performance
Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing
Efficient Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling
Compact Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
• Special coating for handling of corrosive gases and vapors available