Busch Vacuum Solutions

Virginia Beach,  VA 
United States
http://www.buschusa.com/
  • Booth: 733

Innovative Vacuum Solutions for the Semiconductor Industry

Overview

Busch Vacuum Solutions is a leading manufacturer and retailer of vacuum pumps, blowers, compressors and customized systems using vacuum technology. Busch offers a unique range of solutions, support services and technical expertise to meet the demand for diverse applications in every industry. We constantly evaluate our operation in order to maintain the highest standards, and continue to develop innovative technologies that will define the future of vacuum system applications, while still featuring the same durability and quality that has become the hallmark of Busch products.

For more than 60 years, Busch has been an integral part of the global semiconductor industry by providing reliable solutions that enable manufacturers to produce advanced microchips. Continuous advancements ensure that Busch SubFab management solutions are always state-of-the-art and used by hundreds of subfabs worldwide. www.buschusa.com | info@buschusa.com


  Products

  • TORRI Multi-stage rotary lobe vacuum pump
    Flexible - Shortest pump-down time for load lock chambers Efficient - Extremely low energy consumption, minimal maintenance, high uptime Compact - Exceptionally small and light-weight...

  • TORRI BD are one of the smallest, lightest and most energy-efficient dry multi-stage rotary lobe vacuum pumps on the market. As a result, they are the ideal solution for pump-down of load lock chambers.

    With their proven operating principle, they achieve low ultimate pressures. Their best-in-class chamber pump-down time further reduces total average cycle times.

    The fully open communication protocol (Modbus RTU) can easily be adapted to a specific network protocol using standard interface components.

    An optional LCD controller allows easy monitoring of the pump status. All relevant parameters like motor temperature, motor current, cooling water flow and pump body temperature can be displayed.

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