SPS America

Damascus,  OR 
United States
https://www.sps-international.com
  • Booth: 1073

Come visit us at our booth #1073 and #745 (Bavarian)

Overview

SPS-International operates as a manufacturer and stocking distributor of cleanroom process equipment, wafer handling tools, and wet chemistry and CMP consumables for the semiconductor industry, with offices in Europe, America, and Asia. The SPS team emphasizes providing customized solutions and fast supply logistics to its global customers (https://www.sps-international.com)

esPRO (https://www.esproflow.com)

Chemistry heaters, filtration, pumps, flow controllers, PFA fittings, and more for wet chemical handling

WHS (https://www.waferhandlingsystems.com)

Automation and manual wafer handling tools: wafer sorters, bulk wafer transfers, aligners, presenters, vacuum wands, and store/ship solutions

Sparetech (https://www.sparetech.com)

Spare parts and consumables: vacuum robot rebuilds, CMP membranes, pad conditioners, and upgrades for older systems

POLOS (https://www.sps-polos.com)

Lab equipment for R&D and universities: maskless photolithography laser writers, mask aligners, spin coaters, and hotplates


  Products

  • SafeGuard Thin/Fragile Wafer Transfer
    Automated SafeGuard wafer transfer: 76mm to 200mm. Ideal for InP, GaAs, GaN, SiC wafers. Motorized 25-set arm protects edges, boosting yields....

  • Advanced technology automatic SafeGuard wafer transfer for 76 mm up to 200 mm wafers. Engineered for InP, GaAs, GaN and SiC compound wafer handling. Features motorized 25-set transfer arm assembly for gentle lifting of wafers – protecting the wafer edge from abrasion or shock to increase yields; touchscreen recipe software for standard operation and password protected service menu for motor, axis control, event logging. Thin and bonded wafer compatible. ISO 3 (FS209E Class 1) Cleanroom Compatible. SEMI Compliant High- and Low-Profile Cassettes
  • esPRO In-Line Chemistry Heater
    esPRO® Inline Heater uses a PFA insulated electrical resistive element heater. It is designed to safely heat acids, bases, DI water and other noncombustible liquids up to 180°C....

  • Create your own esPRO® Inline Heater!

    The esPRO® Inline Heater uses a PFA insulated electrical resistive element heater. It is designed to safely heat acids, bases, DI water and other noncombustible liquids up to 180°C. 

    This series of esPRO® Ultra-Pure Inline Heaters is designed for use in ultrapure environments and industrial fluid heating applications such as Semiconductor-, PCB-, MEMS-, Electronics-, LED-, Flat Panel-, Solar cell Manufacturing, Chemical Processing, Aerospace, Life Science industry and other applications which require the highest standards of purity. Constructed of PVDF or PFA materials, these heaters can be custom designed and built for use with deionized water, acids, and other diverse process chemistries. Our heaters are engineered and made in Germany.

    Features

    • High efficiency and purity
    • High reliability and low maintenance
    • Compact size for ease of installation
    • No nitrogen purge required
    • SEMI S3, CE and UL compliant
    • Power range: 1.0 - 40.0 kW
    • Ground wire with tantalum or platinum tip
    • Various types of temperature sensors available

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".