Agileo Automation

11 rue Victor GRIGNARD
POITIERS,  F-86000

  • Booth: B1478

Automation for semiconductor tools SECS/GEM connectivity

Software and robotics solutions for semiconductor equipments

Agileo Automation specializes in industrial automation with a high expertise in software services for semiconductor and photovoltaic equipment manufacturers.

With 10+ years experience in semiconductor equipment automation (process equipment, wafer handlers, reticle handlers), Agileo Automation supports its customer from equipment design through customer acceptance.


  • Agil'GEM - SECS/GEM library
    Agil'GEM is a communication library for SECS/GEM and PV2, SEMI E5 and E30 equipment in the semiconductor, photovoltaic and electronics industries....

  • Agil'GEM is a SECS/GEM and PV2 Software library for semiconductor, electronics and photovoltaic production equipment connectivity.
    GEM services:

    •     Equipment communication state and control state
    •     Process program
    •     Collection event sending
    •     Variable data collection
    •     Status data collection
    •     Remote control
    •     Alarm management
    •     Equipment constants
    •     Equipment Terminal Services
    •     Clock
    •     Trace data collection
    •     Limits monitoring

    SEMI standards:

    •     SEMI E4 SECS-I (serial protocol)
    •     SEMI E37.1 HSMS-SS (ethernet protocol)
    •     SEMI E5 SECS-II (message format)
    •     SEMI E30 GEM

    The Agil'GEM library can be integrated directly in Agileo Automation Equipment Controller Framework or in a third party Equipment Controller software through its COM/DCOM or .NET interfaces. The following languages can be used to integrate it C#, VB.Net, Pascal (Delphi), C++.

    Open sources integration samples can be provided with the SDK (Software Development Kit) for C#, VB.Net, Pascal and C++. Below, a screenshot of the the C# integration sample.

    An interface for PLCs is possible with the GEM4PLC architecture, which allows gateways with specific protocols such as Modbus or OPC-UA. The use of a third party OPC-DA server allows the implementation of gateways with almost all PLC brands on the market, including: Allen-Bradley, B&R, Beckhoff, CoDeSys, Fanuc, Hilscher, Honeywell, InTouch Client, Mitsubishi, Omron FINS, Siemens S5 and S7, Wago, Yaskawa, Yokogawa, etc.

    Integration support

    Beyond technical integration details, Agileo Automation helps its customers to understand GEM standard to adapt it to a given equipment thanks to a structured approach starting with a good understanding of the equipment

    Agil'GEM comes with a free manual version of Speech Scenario, our host simulator software for testing.

  • A²ECF Semi - Your tool operating system
    A²ECF SEMI is a software framework for the control of process or metrology equipment including the management of a robotic loading platform (EFEM, Equipment Front End Module)....

  • A²ECF Semi is a software framework for process or metrology equipment control including EFEM (robotics loading platform) management.

    A²ECF Semi is intended for equipment manufacturers in the semiconductor, electronics or photovoltaic industries.

    Higly customizable, this SEMI E95 compliant framework proposes a standardized way to present user interface for semiconductor applications:

    • Multiuser management with access rights (operator, process engineer, field service engineer for example)
    • Automatic trace generation with tools to analyze equipment activity
    • Operator actions recording
    • EFEM devices management such as (contact us for list of supported devices):
      • Wafer handlers with one or dual arms
      • Pre-aligners
      • Load Ports and FOUP Openers
      • Scribe readers
    • Schedulers for wafer flow sequencing
    • Data collection to the Fab Host and Remote control through SECS/GEM and PV2 interface library Agil'GEM or GEM300 (GEM + 300mm automation standards including in particular Carrier Management, Process Job, Control Job and Substrate Tracking through the integration of CIM300 from Cimetrix)


    A²ECF SEMI can be integrated either by your team after training, or by Agileo Automation team, or both.

    Most of the time when we take care of the development, we create the first application based on the basis of specifications that we can write together during a consulting phase. In this case, we are able to commit to a budget and a timeframe up to the tool acceptance at your customer's site, including SECS/GEM connectivity. Developments are carried out using our methodology in order to ensure the expected quality and meet deadlines.

  • Speech Scenario - SECS/GEM quality
    Emulate the Fab Host to validate your SECS/GEM tool scenarios before shipping your equipment....

  • Emulate the Fab Host to validate your SECS/GEM tool scenarios before shipping your equipment.


    • Receive and Send any SECS-II compliant message (including E40, E94, E87,…)
    • Create your own messages in SMN
    • Use data to parameterize your messages
    • Associate different sessions to different kind of tools
    • Use transparently Serial or Ethernet communication
    • Use several communication configuration
    • Provide logs in SMN (E173) SEMI standard to your customers prior to tool shipment
    • Log CEIDs with a meaningful name
    • Emulate Host or Equipment with one software

    Technical details: 

    • Native .Net application
    • Based on Agileo Automation’s field-proven SECS-II drivers
    • Run on Microsoft® Windows® 7 x86 and x64, Microsoft® Windows® 10 x64
    • Supports E4 SECS-I (serial protocol), E37 HSMS-SS (ethernet protocol), E5 SECS-II, E173 XML SECS-II Message Notation
  • Agil'Sorter - Software to control wafer sorters
    A complete software to control wafer sorters...

  • Main features: 

    • Software for 200mm or 300mm wafer sorters
    • Hardware options: 1 to 4 Load ports, 1 robot, 1 to 2 aligners, 1 to 2 Wafer ID Readers (Cognex), E-84 with dedicated electronic cards.
    • Must be adapted according to the OEM's communication hardware interface and specific functionalities
    • Can be put in OEM colours
    • Based on A²ECF SEMI

    Additional features: 

    • User interface for operator including:
      • Tool status with wafer mapping and scribe read results
      • Login with user access
      • Ready to be translated
    • Process program configuration for sorters with :
      • User-defined sorting at execution
      • User-defined sorting at configuration
      • Sorting by wafer id
      • Pre-defined sorting algorithms
    • Jobs and high throughput wafer scheduler with :
      • Process program execution
      • Local user control or Remote control from the MES
    • SECS/GEM interface (SEMI E37, E5, E30)
    • GEM300 (SEMI E39, E90, E40, E94, E87) option with third-party library CIM300® from Cimetrix
    • Communication with hardware (to be specialized)
    • Maintenance Mode with On-Line/Off-Line Diagnostics
    • Software and Hardware configuration
    • Simulator for software maintenance, pre-integration of factory connectivity and customer demonstrations
    • Documentation:
      • User Manual
      • Automation (SECS/GEM or GEM300) interface description
    • Run on Windows 7 or Windows 10 x86 or x64

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