Areas of application
• Lithography
• Chemical mechanical polishing (CMP)
• Etching processes
• Analysis
Features
• High-resolution linear actuator with stepper motor
• Diaphragm globe valve based on the iComLine series
• Tried and tested plug diaphragm design
• All media wetted parts are made of PFA or PTFE
• 1 million qualified control switching cycles
• Cleanroom manufacturing (HP version), complies with SEMI F 57
• Low space requirement due to compact design
• Can be integrated into manifolds and M-block valves
• Suitable for ultra pure, corrosive media