It includes cassette holders where an RFID reader can be installed as option , or FOUP openers, 3 axis (or 4 in case of 300 mm) Scara robot , automatic centering and aligning station where a wafer ID reader can be installed as option , a chuck where wafer is positioned and driven to process area.
Process applications:
Photolithography
Wafer thinning
Metallization
BEOL
UV curing
On request