Am Weiher 3
Moritzburg,  01468

  • Booth: B1221

advanced wafer and carrier handling solutions

Adenso - Solutions you need

Wafer and Carrier handling in high vacuum environments as well as in glovebox systems and clean rooms are one of the core competencies of Adenso.

Using the modular VAC.ROBOTICS platform supports our customers in optics and semiconductor industry to create your own CLUSTER.SYSTEMS in a simple way.

Configure your own Robot.Platform simply by using:

Flexible substrates such as the thinnest foils made of polymers, metals and even glass are processed by our customers on the modular winding platform from Adenso:

Adenso products are developed and produced in Silicon Saxony in and around Dresden, so they are completely Made in Germany.

#waferhandling #carrierhandling #vacrobotics #ionimplantation #R2R


  • adLOAD | advanced High Capacity LoadLock Module
    adLOAD for high substrate capacity Configure your own Robot.Platform simply by using: ...

  • adLOAD for high substrate capacity

    adLOAD forms a completely new category of LoadLock.Modules for cluster systems, which is characterized by a previously unattained substrate.capacity.

    Instead of the previous only 25 wafers per cycle, 30, 40, 50 wafers and more can now be accommodated in a LoadLock –an enormous increase in the autonomy time with the same footprint!

    All options and combination options known from the VAC.ROBOTICS platform, such as Alignment, multi substrate gripper, temperature control, … are compatible with this series.

    As is typical for Adenso, the adLOADs can also be configured for sizes with a substrate size of 200 and 300mm.
    Combined with the 7port central platform, it offers future-proof flexibility for all applications.

    Configure your own Robot.Platform simply by using: 

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