UV-KUB 3, 4’’ or 6’’ version, is a very compact mask aligner (475 x 480 x 515mm and 55kg / 121lbs) for the patterning and alignment of 4ʺ or 6ʺ wafers.
No need for a cleanroom type environment
Fully operated by a touch-screen for exposure and controlled with a joypad for alignment operations, this new generation of mask aligners is particularly adapted for researchers needs, in many fields like microfluidics, integrated optical circuits, microelectronics, MEMS, semiconductor manufacturing…
Resolution and alignment precision
Compatible with all standard photoresists (AZ, Shipley, SU8, K-CL), UV-KUB 3 is a high resolution mask aligner offering the most competitive price on the international market, and it enables the realization of microstructures down to 0.8µ resolution and of overlays with an alignment precision inferior to 1µm.
UV-LED light source : high quality collimated exposure
The divergence angle below 2° makes possible to work on thick layers as well as on thin layers, with the same rendering of the edges and no roughness.