ASML Netherlands BV

De Run 6501
Veldhoven,  NL-5504 DR

  • Booth: B1375


  • Refurbished systems
    Refurbishing ‘classic’ PAS 5500 and TWINSCAN lithography systems for a new life and a new purpose...

  • The PAS 5500:a machine with a history

    Before EUV, before immersion, and even before our TWINSCAN systems, there was the PAS.

    In 1991, seven years after the company was founded, we launched the PAS 5500, which turned out to be our breakthrough platform. This system was able to dramatically reduce manufacturing times for our customers, and its modular design enabled them to produce multiple generations of advanced chips using the same system.


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