The semiconductor division of SINGULUS TECHNOLOGIES AG (SINGULUS TECHNOLOGIES) was awarded an order for a TIMARIS type cluster tool for vacuum deposition on 300 mm wafers. The order in a mid-single-digit range was placed by one of the largest semiconductor foundries of the world and is intended for mass production of integrated inductors.
“We are pleased to convince an additional leading semiconductor foundry with our TIMARIS vacuum deposition platform. Paramount this success was our competence in process development, reliability and productivity of our cluster tools in a state-of-the-art 300 mm Fab”, comments Dr. Stefan Rinck, CEO of SINGULUS TECHNOLOGIES.
Integrated inductors enable highly-integrated voltage regulators. Thin-film transformers convert higher supply voltages to lower operating voltages directly in the chip/package. This has two primary benefits: The considerably smaller footprint allows higher integration in mobile devices. Datacenter benefit from reduced ohmic losses as transformation to higher current takes place at the consumer. SINGULUS TECHNOLOGIES thus enables further integration in the semiconductor industry and the reduction of energy consumption.
The vacuum deposition cluster tools of the TIMARIS type have modular design and can be equipped with various deposition and auxiliary modules. Amongst others, they include modules for sputtering, which can be equipped with several cathodes and operate in ultra-high vacuum of 10-9 Torr. Furthermore, they seamlessly integrate into the host system of modern, fully automated 300 mm fabs.