CS CLEAN SOLUTIONS AG

Fraunhoferstrasse 4
Ismaning,  85737

Germany
http://www.csclean.com
  • Booth: B1221


Exhaust Gas Abatement-global network of service

EXHAUST GAS ABATEMENT TECHNOLOGY
Unused process gases and hazardous by-products must be removed efficiently and safely from exhaust lines to ensure safety of personnel, compliance with regulatory emission standards, and process uptime. CLEANSORB® dry chemisorber media removes hazardous process gases by chemical conversion to stable solids at ambient temperature, and is the enabling technology for the CS CLEAN SOLUTIONS dry scrubbing product line. No external heating, moisturization, or other facilities are required for operation.
The chemisorption reaction between gas and absorbent is irreversible, ensuring that hazardous gases are bound in solid form and cannot be re-released. After removal from the CLEANSORB cabinet, the column is ready for shipment to the nearest CS CLEAN SOLUTIONS Refill and Service Center. There, the absorber columns are cleaned, refilled, checked-out and tested in accordance with local or national regulations.
Where possible, the spent materials are re-processed for recovery of metals, or other industrial uses. Our dry scrubbing resins are subject to permanent quality control procedures and ongoing R&D work to keep abreast of emerging semiconductor process recipies and chemistries.


 Products

  • CLEANSORB® PRIMELINE PS AND PD
    The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. T ...

  • The PRIMELINE series represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. The system is especially engineered to handle the gas flows and related operating conditions of safety-critical process applications – notably those of Metal Organic Chemical Vapor Deposition (MOCVD). The smaller-footprint CLEANSORB PS models feature a back-up column, allowing production to be run to completion even after the capacity of the main absorber column has become depleted. The larger CLEANSORB PD model incorporates two full-size absorber columns plus a back-up column; one main column can remain active absorbing exhaust gas with full SEMI-S2-compliant safety protection, while the second column is independently purged before removal from the cabinet for refilling.
    Your advantages:
    •Dedicated CLEANSORB® chemisorber media for critical MOCVD gases such as AsH3, PH3 or GeH4
    •Optimized for safe thermal management of high flow silicon and III-V epitaxial processes
    •Unique safety functions such as infra-red temperature monitoring and inert gas cooling
    •Touch-screen control (PD model) with automated operating routines
    •Available as SEMI-S2 compliant version with redundant safety features
  • CLEANSORB® FABLINE FX
    FABLINE is the standard model for the removal of noxious gas at the production level. It is available in three sizes and can be optimally adapted to the requirements of a pilot line....

  • The FABLINE FX series offers the interruption-free advantage of a CLEANSORB dual-column model, but with a lower floor space requirement. These two attributes make it the CLEANSORB model of choice for high volume manufacturing. The main absorber column of the CLEANSORB FX series is backed-up by a smaller maintenance column, allowing the main column to be purged and changed out without the need to halt production or bypass the scrubber. Available in three different column sizes, the “FLEX” design also allows the system to be configured without the back-up column, making it ideal for pilot-line or other low-volume production requirements where column replacement can be more easily scheduled. Inlet pipework, valves and fittings are mounted as a single compact assembly, allowing easy access for maintenance work.
    Optional configurations include: Temperature-controlled heating to minimise deposition of condensable solids at the system inlet; Infrared temperature monitoring of both absorber columns for process chemistries which use energetic materials.
    Operating modes and system status can be selected or visualized via a touchscreen display at the front of the cabinet. Inert gas purging and leak-testing of the absorber column and gas lines are both automated. Several modes of remote interfacing are available, including USB, Ethernet, FTP, NTP and OPC.
  • CLEANSORB® LABLINE
    The ability to passively chemisorb hazardous gases at ambient temperature is a particular advantage for sporadic laboratory work since the LABLINE is not started up each time a new experiment is to be run....

  • The CLEANSORB LABLINE features a small absorber column housed in a compact, air-extracted cabinet. The ability to passively chemisorb hazardous gases at ambient temperature is a particular advantage for sporadic laboratory work since the LABLINE is not started up each time a new experiment is to be run. The wide selectivity of CLEANSORB® chemisorber media to a diverse list of gases and liquid precursors, ranging from corrosive or toxic species to latest-generation metalorganic complexes, offers ideal flexibility for R&D requirements.
    Your advantages:
    •Negligible installation costs for laboratory environment, simple to operate
    •Long column lifetime on R&D applications – low running costs
    •Can be used to abate combined vent purge gases from several gas cabinets
    •Front panel control and parameter display, volt-free contacts and a digital signal interface
  • CLEAN-PROTECT
    The CLEAN-PROTECT is designed to absorb toxic or otherwise hazardous gases during a catastrophic gas leakage incident from within a gas cabinet or gas bunker....

  • Hazardous process gases commonly used in the chemical, pharmaceutical, and semiconductor industries are usually supplied from cylinders in an air-extracted cabinet. The CLEAN-PROTECT is designed to absorb toxic or otherwise hazardous gases during a catastrophic gas leakage incident from within a gas cabinet or gas bunker. This trusted safety product has been protecting workplaces and factory neighborhoods at installations around the world for over 30 years.
    Applicable to a wide range of hazardous gases, including: AsH3, BF3, Br2, Cl2, ClF3, COCl2, F2, HCl, HF, HBr, H2S, H2Se, HCN, NH3, N2H4, PH3, SO2.
    Your advantages:
    •High air extract flowrates, protection of multiple gas cabinets
    •Scrubbing capacity for full gas cylinder
    •Low pressure drop
    •Permanently online, practically no maintenance
    •Fully passive – no electrical connections
    •Typical 5 years service life between absorber refills
  • CLEANVENT
    Before a new gas cylinder is put on-line process gas must first be removed. It remains from the previous cylinder within a gas supply cabinet. This ist done for reasons of safety and to ensure integrity of fresh gas supply....

  • Before a new gas cylinder is put on-line process gas must first be removed. It remains from the previous cylinder within a gas supply cabinet. This ist done for reasons of safety and to ensure integrity of fresh gas supply. The dead volume of residual gas is likely to be highly concentrated, toxic, pyrophoric, or corrosive. Thus posing a considerable safety hazard.
    For over 25 years the CLEANVENT cartridge has proven itself a safe solution for the removal of hazardous purge gases.
    Your advantages:
    •At-source removal of hazardous vent gases from within gas cabinet or valve manifold box
    •Safe, irreversible conversion of gases to solid by-products at room temperature
    •Cartridges available for over 100 different gases and organometallic precursors
    •Cartridge servicing and refill by specialist local service centers worldwide

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