KITEC microelectronic technologie GmbH

Rennweg 59
Erding,  D-85435

Germany
http://www.kitec.de
  • Booth: B1141


KITEC - Solutions for equipment automation and metrology.

KITEC microelectronic technologie GmbH was found 1987 specialized in frontend semiconductor equipment, metrology tools and wafer handling systems. We represent and distribute equipment for metrology and wafer handling. Metrology Non contact resistance and thickness measurement systems with wafer mapping and automatic wafer loading for wafer from 2“ up to 300mm. Wafer Handling Automatic batch wafer transfer tools for a wide range of applications including OEM integrations. Single wafer sorters with two load ports tabletop and multistation with integrated OCR reading. Automatic microscope stage loaders including macro inspection and complete visual wafer inspection systems. Automated optical inspection system to detect, analyzed and classification of defects.

Please see us at our booth to discuss your specific requirements.


 Products

  • Vacuum Wand - in-house and Porta-Wand ELITE
    Light-weight vacuum wafer wand has a push button and is ideal for connection to an in-house vacuum system. The battery operated Porta-Wand ELITE vacuum wafer wands are ideal for all applications where no vacuum supply line is available. ...

  • Light-weight vacuum wafer wand has a push button and is ideal for connection to an in-house vacuum system. For ESD protection the handle is made of conductive material. The vacuum is normally open and is shut off when pressing the push button.

    The battery operated Porta-Wand ELITE vacuum wafer wands are ideal for all applications where no vacuum supply line is available. The charger for the rechargeable NiMH battery serves as a stand for the instrument. The integrated vacuum pump allows the tool to lift over 500 grams. A push button provides easy on/off control. Internal air filters protect the vacuum pump and also ensure Class 1 performance.

    Wafer tips for the vacuum wafer wands are available in a number of different designs to accommodate various wafer diameters.

  • M-RES non contact resistance measurement systems
    M-RES non contact resistance measurement systems with Eddy Current method for semiconductor applications with mapping capacibility. Non-contact resistance and resistivity measurement system for low resistivity samples and high resistivity samples...

  • The M-RES systems are non contact resistance measurement systemss with Eddy Current method for semiconductor applications is a non-destructive way to measure your wafers!  It is indepent from the surface and can be used with non-conductive layers on the surface of the samples. It is possible to use on bulk samples or conductive layers coated.

    We offer manually operated system for laboratory, but also manally loaded system with mapping capability. Furthermore we offe fully automatic system with wafer loading and mapping capability.

    - Resistivity range from as low as 1mOhm up to 100kOhm

    -Wafer diameter up to 300mm

    - Wafer thickness up to 2mm


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