We offer two types of Water Trap configuration:
1. In-line Water Trap, which sits between the Turbo pump and the chamber, to complement the Turbo pumps H2O pumping speed
2. In-Situ Water Trap, which is installed directly into the chamber to decrease the partial pressure of H2O in the chamber
Our line up for the In-line, includes an 8” to 12” flange, with optional flange types available.
We offer a unique sublimation regeneration process, with no heaters in the system. Regeneration is performed by reverse cycle operation, as with our Cryopump systems, via a control system.
What is truly unique about the Sicera offering is that a customer is able to operate (5) Sicera 8” Cryopumps and (1) Water Trap from (1) compressor.
For more details, please contact us or visit our website: SICERA® Smart KZ-08 In-Line Cold Trap (Thin Type) - SHI Cryogenics Group