Auke Vleerstraat 3
Enschede,  7521 PE

  • Booth: 308

Solmates is an ambitious and fast-growing equipment supplier of thin film deposition tools based on Pulsed Laser Deposition (PLD). The Solmates mission is to develop and mature PLD so it can be considered a mainstream high volume production deposition technology as currently employed in semiconductor and MEMS industry. The Solmates portfolio stretches from stand alone equipment, to cluster compatible deposition tools that enable integration of PLD with any other vacuum technology.

New applications and markets are demanding continuous improvement of deposition technology to address the new challenges in thin film processing. The availability of high quality PLD processes on up to 300mm wafers allows our customers to extend their thin film deposition capabilities addressing new possibilities to solve these challenges. As a highly innovative company Solmates can combine IP-protected hardware with years of processing experience to support integration of our layers into your application.

 Press Releases

  • Solmates is pleased to announce the sale of a 300mm Pulsed Laser Deposition (PLD) system to CEA-Leti. This PLD unit embodies Solmates’ latest proprietary capabilities and allows integration with established cluster platforms, so as to combine it with other process steps. Upon installation of the system, during H1/2020 in CEA-Leti’s cleanroom in Grenoble, France.  Solmates and CEA-Leti will start a Joint Development Program to develop thin-film materials for 5G applications, such as lead-free alternatives for piezo actuators (RoHS directive) and upscaling to 300mm wafer size. The goal is to obtain robust and cost-efficient deposition of thin films with unique material properties.

    Sothachett Van, Business Developer at CEA-Leti, says:

    “As a leading technology research institute, CEA-Leti is looking forward to this new PLD equipment platform because the physics of Pulsed Laser Deposition has intrinsic advantages that enable us to develop new materials. Solmates is the leading equipment provider for PLD processes. This collaboration will enable CEA-Leti to seize the opportunities of PLD to develop novel devices for the 5G markets.”

    Arjen Janssens, CEO of Solmates, says:

    “The Solmates’ development and engineering teams have made fantastic progress and we are fulfilling our roadmap on application performance and defect controls. Supported by the SME Five-G grant*, we have developed a new cluster compatible PLD chamber configuration for the 200 and 300mm manufacturing market. CEA-Leti is widely recognized for development of advanced technology, with knowledgeable people and strong industrial partnerships. We are excited about this collaboration as this will boost our mission to provide PLD as manufacturing-ready technology for deposition of thin films.”

    For more information about CEA-Leti, please visit:

    *) The FIVE-G project is funded by the EU under the H2020 program (contract number: 858428).

  • Solmates is pleased to announce The Suzhou Institute of Nano-tech and Nano-bionics (SINANO) placed an order for a wafer-based Pulsed Laser Deposition system for its 6 inch Nano Fabrication Facility (SNFF). SINANO, part of the Chinese Academy of Sciences, is a leading research institute with an emphasis on research related to information, energy, life sciences and the environment. The SNFF facility is open to the public and there is a strong collaboration with industry, mainly by development of new materials and processes which can be transferred to industry. The PLD system, model SMP 800, will be shipped, installed and qualified in Q1 of 2020, thereby greatly expanding the material processing capabilities of SINANO.

    Following in the footsteps of imec, EPFL and MESA+, a leading research institute in China has selected Solmates PLD technology to expand their thin film deposition capabilities” commented Solmates’ CEO Arjen Janssens, “SINANO is a well-known hub for bringing new MEMS designs to production level with highly innovative companies. We are excited that our system is going to be used in such promising and dynamic eco-system”.

    For more information about SINANO please visit:

  • Solmates is pleased to announce its first sale for the 5G base station market. The PLD-based thin film deposition tool will be located at a production facility in the US, and will be shipped in Q4 of 2019. 
    This deal confirms the need for wafer based PLD processing in the 5G volume production market.  The challenges for the 5G base stations and receivers require the introduction of novel material systems. Solmates’ Pulsed Laser Deposition systems are the technology that is ideally suited to integrate these new materials into device layer stacks. 

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