Minato-ku,  Tokyo 
  • Booth: 2622

Total Transport System Solution

 In SEMICON CHINA, our theme will be based on “Supporting cutting edge environment and legacy environment” and will present our audience with Vacuum Platform, N2 EFEM, and Vacuum Linear Transport Unit. With the emergence of IoT, Semiconductor equipment is advancing rapidly and Sinfonia has variety of legacy environment compatible lineups of transport equipment such as “SELOP-7” with 300/200mm Wafer Auto Switching Loadport, “SELOP-8” compatible with an upgradable N2 Purge. Our exhibition is a paramount representation of our Total Support for various processes including 150mm, 200mm, 300mm.


  • N2 EFEM
    Ability to perform cutting edge processes by regulating Ox/H2O levels within the EFEM....

  • Extremely Low Level Oxygen Density Control

     Less than 100ppm with low N2 Gas Consumption (100LPM) by N2 Gas Circulation System

    Fine Differential Pressure Automatic Control

     10 +/- 3.5 Pa gage

    Equivalent Footprint as Conventional EFEM

     With the stationary type robot, maximum 4 LP access is possible :

     No need to change depth of N2 EFEM Maintenance access from side as Conventional EFEM

     (Or can use EFEM Side Position for Additional Options)

     Flexible Layout for Position of Customer L/L

    EFEM Inside Environment Monitor/Analyzing

     Digital Analyzers (Oxygen Concentration, Dew Point, Temperature, Diff. Pressure)

     Real Time Data Monitoring

    Safe Operation

     Safely replace N2 gas to Air

     S2, S8, CE Compliance (In Progress)

  • 300mm FOUP Load Port SELOP-8
    Contribution to Further Miniaturization Releasing Next Generation Load Port...

  • Extremely Smooth FOUP door Open/Close Motion
    Great improvement of particle performance Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism.
    Compliance of high sealed FOUP.
    MCBF 1,000,000 cycles achieved.
  • 300/200mm Wafer Auto Switching Load Port
    One Configuration Available in Both 300mm and 200mm. 200mm Wafer is also available to 300mm Wafer LP by just setting Open Cassette Adapter....

  • 300/200mm Wafer mapping function. (No Change Required)
    Preventing mechanism for wafer protrusion.
    Safety lock function to keep adapter door close miwhen wafer is being transported.
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