The system comes with two load ports for 8” Semi Standard Open Cassette and 12” FOUP Cassette or 12” FOSB Cassette, two load ports for 8” Canister and 12” Canister (Configurable to 1x Canister and 1x Wafer Jar with optional cartesian robot module) and one port for interleaf paper (Auto-conversion for 8” and 12” wafers). WPS3800 comes with built-in vision sensor for wafer, interleaf paper or ring spacer detection and built-in height sensor on canister & wafer jar loading port for robot’s accuracy during pick and place process.
- Comes with 2 x FOUP/FOSB for 12” Wafer and Open Cassette for 8” Wafer with Integrated Wafer Protrusion Detection Sensor and Thru-Beam Wafer Mapping
- 2 x Universal Shipping Carrier Station for Various Type of Canister and Wafer Jar with Auto-Detection for 8” & 12” Wafer Size
- 1 x Interleaf Paper Port (Auto-Conversion between 8” & 12” Paper)
- Hirata 4-Axis ATM Robot with Flip Axis (Radius-Theta-Height-Flip Axes)
- Built-in Vision System for Wafer, Interleaf Paper or Spacer Detection and Built-in Height Sensor for Robotic Handling Accuracy
- Cartesian Robot Module for Wafer Jar Handling(Optional)
- Wafer Ring Separator Handling Module for Canister (Optional)