Wonik IPS Co., Ltd.

Pyeong taek,  Gyeonggi-do 
Korea (South)
http://www.ips.co.kr
  • Booth: 3139


Thanks for your interesting about equipments of WONIK IPS.

WONIK IPS Co., Ltd has supplied global leading semiconductor and LCD, OLED, Flexible display manufacturers with 300mm semiconductor equipment of IPS obtained verified technology in the most advanced several tens nm semiconductor mass production line for heat treatment process between 100°C~1,350°C of a wide range of temperatures and CVD processes, Gas Supply Systems and Gas Purifiers, PE-CVD since its foundation in 1991 with the goal of customer satisfaction. These experiences and achievements have become our driving force to make us and industry leader in the Gas Supply System and Gas Purifier, PE-CVD now. Based upon these, all our staff are moving forward for Customer Surprise beyond Customer Satisfaction.


 Products

  • 300SE, 300SP
    LPCVD system * Applications - Poly, ALD, Oxidation/Annealing, etc.....

  • The 300mm LPCVD (Low Pressure Chemical Vapor Deposition) system deposits thin film including Doped Poly Si, LPTEOS, Nitride, and MTO which is the core process for semiconductors using a chemical reaction in a low pressure state.
    LPCVD is applied to several tens of nm semiconductor manufacturing process. Moreover, it needs increased thin film uniformity and step coverage as design rules become more rigid. Our company satisfies these specifications by our unique chamber structure and gas supply system.
    And high-end equipment has excellent competitiveness which is provided by suppressing the occurrence of particles due to by-products generated through a chemical reaction, and by obtaining our company’s own design technology to prevent contamination, various mass production experiences and know-how, because of the characteristics of deposition equipment. Due to our design capability and experience, our high end equipment has excellent competitiveness by minimizing particles from by-products generated through chemical reactions which also prevent contamination.

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