COMET Mechanical Equipment (Shanghai) Co. Ltd.

Shanghai, 
China
http://www.comet-pct.com
  • Booth: 2439


Welcome to Comet, your partner for RF power solutions!

Comet – RF technology is our passion

Comet is a leading expert in RF power delivery and a global innovation partner of RF related businesses. Our customers are primarily manufacturers in the semiconductor and adjacent industries with the goal to improve performance, reliability, repeatability, throughput and yield of their RF system.

Our high value RF solutions include generators, impedance matching networks and vacuum capacitors – specialized components used for precise control of plasma processes for thin-film deposition/etching and flat panel displays.

Customers come to Comet with their most difficult RF problems. Since 1965, our products have earned a global reputation of excellence in quality and reliability.We combine business experience with high-level technological expertise, always developing new ways for our customers to gain marketplace advantage.

If you want to improve the performance, reliability, repeatability, throughput & yield of your RF systems – visit us at booth #2439.


 Products

  • Step up your system with Comet RF Power Solutions
    Comet Plasma Control Technologies develops/manufactures high quality vacuum capacitors, high-performance RF generators and impedance matching networks used for precise control of plasma processes like thin-film deposition and etching for semiconductors....

  • Comet RF Generators: At the Heart of Advanced Power Delivery
    Comet offers full feature RF generators from 13 MHz to 100 MHz and power from 600 W to 7 kW with pulsing and precise power control. Our expert team provides the RF solution you need with robust designs resulting in greater operating efficiency, stability and reliability, lower heat build up and lower power consumption.

    Impedance Matching Networks: Designed to meet Current and Future Needs
    Comet offers standard and custom RF matching networks. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry. Unlike other matching network suppliers, Comet has a full line of variable vacuum capacitors and the experts who design these key components. Comet’s Vacuum Capacitor and Matching Network designers work closely together to create products that no other competitor can offer.

    Comet Vacuum Capacitors: Combining Expertise and Technology
    Get to know the latest generation of Comet vacuum capacitors with higher power density that address more sophisticated applications and production processes for customers.
  • NEW: High-current, compact Vacuum Capacitor
    Combining the most useful features of Comet’s Vacuum Capacitors, along with a new special cooling technology, allows the use of high current in a compact size vacuum capacitor....

  • Vacuum Capacitor with hybrid-cooling technology:

    Comet hybrid-cooling technology has been developed as an extension of the well-known Hexa-Con product range. The first hybrid-cooled, small size capacitor series offers users the best of both worlds: the compact size allows the use of higher power within the same matchbox size, and users profit from reduced total cost of ownership at the same time. When comparing diameter versus power density, the Hexa-Con series with hybrid-cooling technology is best in class.

  • Comet Universal Motorized Capacitor
    Comet Motorized Capacitors offer the latest integrated drive technology for vacuum capacitors at the best price-per¬formance ratio. A single communication protocol for RS232 and RS485 provides flexibility in a wide range of applications....

  • Universal Motorized Capacitor:

    Motorized Capacitors are the ideal solution for high-precision operation. Besides ensuring highest accuracy, capacitors with integrated drive system simplify procurement with an easy-to-install subsystem. The core component of the Universal Motorized Capacitor is a Comet variable vacuum capacitor, which includes an insulating cover, coupler and stepper-motor to drive the capacitor. A durable, backlash-free coupler connects the capacitor to the drive system. Assembled flanges ensure easy mounting in the system. Appropriate high-voltage insulation between the capacitor and the mounting flanges is also included.

  • Comet RF Generator cito Plus
    cito Plus has taken Comet’s RF generator program to the next level in performance and precision. With superior pulsing quality, stability and power measurement accuracy, it is designed for the highest stability into dynamic loads....

  • cito Plus’s fully integrated approach to the newest technology platforms of the semiconductor industry is also highly suitable for upgrading older plasma systems.

    The cito Plus new levels of accuracy enable plasma processes to be controlled with previously unattainable precision. Together with improved RF stability, users can fully optimize their plasma equipment, and take advantage of ideas for new technologies and products.

    With cito Plus, our customers benefit not only from predictable plasma behavior and system integration, but also from repeatable wafer-to-wafer results and stable operation using any cable length.
  • Comet Impedance Matching Networks
    Comet offers standard and custom RF matching networks. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry....

  • Designed to meet Current and Future Needs

    COMET offers standard and custom RF matching networks. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry. Unlike other matching network suppliers, COMET has a full line of variable vacuum capacitors and the experts who design these key components. COMET’s Vacuum Capacitor and Matching Network designers work closely together to create products that no other competitor can offer.
  • Comet Vacuum Capacitors
    Broadest selection of capacitance, power, voltage and drive systems in the market. Produced with the best materials, fabrication processes and quality standards....

  • The design, construction and processing of Comet Vacuum Capacitors combined with decades of experience in precision manufacturing assure outstanding quality standards. The unique modular design of the capacitors allows a high degree of flexibility in production and guarantees delivery of special types on very short notice. The superior performance and reliability of the products have been proven by hundreds of thousands of units in operation at customers worldwide.

    For performance reasons all capacitors are made with ceramic envelopes, which enable the capacitors to withstand higher thermal and mechanical loads than glass. The universal design matches with a wide range of sockets and most units are electrically and mechanically compatible and interchangeable.
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