Fugen : Korea
QTS : China Wuxi
FUGEN is specialized in repair, maintenance, remodeling and improvement of 200mm and 300mm ETCH equipment
FUGEN also repairs various robots, load ports, vacuum valves and so on.
FUGEN is registered as official repair company in SK Hynix Wuxi and Samsung Xian Semiconductor factories for repair of VAT Pendulum Valve through QTS in China.
FUGEN is repairing and selling various equipment parts related to LAM equipment. In particular, DUAL L-motion Valve, which is developed by FUGEN
replacing OEM Rocker Valve, has been evaluated by the SK Hynix process and many of them have already been installed to the production systems.
FUGEN is repairing and delivering AMAT Producer VHP and Endura XP robots as official supplier of FALA TECHNOLOGY (distributor SPARETECH).