Kyungwon Tech Co., Ltd.

Seongnam, Gyeonggi,, 
Korea (South)
http://www.tbnsolution.com
  • Booth: 5783

Since Kyungwon Tech was established in 1998, we has been providing comprehensive consulting services in the field of computational fluid analysis and plasma processing. We have developed our engineering software K-SPEED (3D feature profile simulator for plasma process) and FanDAS (simulator for design optimal fan shape).

In K-SPEED package, especially, there are 

• K-0DPLASMA is a bulk plasma simulator to predict essential properties of the TCP/ICP/CCP plasma using spatially averged 0 dimension approach.

• K-SPEED is a feature profile simulator to predict phenomenon under etching and deposition process such as void, etch stop, polymer passivation effect.


 Products

  • K-SPEED
    K-SPEED is a simulator for plasma etching profile to predict etching profiles and accompanied phenomena via effective computation taking into account various physical and chemical effects essentially which affect on dry etching process....

  • K-SPEED is a simulator for plasma etching profile to predict etching profiles and accompanied phenomena such as bowing, necking, etch stop, polymer passivation via effective computation taking into account various physical and chemical effects essentially which affect on dry etching process.    
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