M-O-T Mikro und Oberflachentechnik GmbH

Saarbruken, 
Germany
http://www.mot-semicon.com
  • Booth: 2481


Discover wet chemical solutions for your application

M-O-T is the industry leader for customized wet chemical solutions.

We develop processes, machines and turnkey solutions at the highest technical and technological level. Our aim is to provide superb customer satisfaction even for the most complex projects.

M-O-T delivers powerful, user-friendly and leading edge processes with superior production efficiency. These proprietary technology innovations are now readily available on a worldwide scale.

We constantly stay in touch with the latest industry research so that we can implement relevant innovations into our product line to meet stringent customer requirements.

Our goal is to continue to be an international technology leader in the future.

We are cpable of.


 Products

  • µGALV
    Electroplating Platform for application like MEMS, Semicon, TSV, etc. The system will be supplied including adapted electrolytes and process integration....

  • The electroforming unit μGalv is an advanced plating tool for all kind of plating applications in the MEMS-, Semicon-, Optic- und Solar Industry. Because of the flexible arrangement and build-up of the processes including process ramp-up, the electroforming unit μGalv is the ideal tool either for industrial or R&D demands. Of course, customized solutions are available after clearing the technical details.

    The MOT team has literally hundreds of combined years of experience developing ECD processes, and they are eager to help you. Our Applications Lab in Germany has all necessary tools to process wafers and measure results, therefor we can help select chemistries and advise you on options each step of the way.

    ctroforming unit μGalv is an advanced plating tool for all kind of plating applications in the MEMS-, Semicon-, Optic- und Solar Industry. Because of the flexible arrangement and build-up of the processes including process ramp-up, the electroforming unit μGalv is the ideal tool either for industrial or R&D demands. Of course, customized solutions are available after clearing the technical details.

    The MOT team has literally hundreds of combined years of experience developing ECD processes, and they are eager to help you. Our Applications Lab in Germany has all necessary tools to process wafers and measure results, therefor we can help select chemistries and advise you on options each step of the way.

    Wafer Sizes: Up to 300mm

    Applications: Pads or Contacts, Redistribution Layer RDL, Pillar,  TSV fill, MEMS, Wafer Chip Scale     Package (WCSP)

     

  • µCHEM
    Wet Etching Platform for industrial application like MEMS-, Semicon-, Optic- und Solar Industry....

  • The etching unit μChem is a sufficient wet chemical process tool for all wet chemical process steps needed in the MEMS-, Semicon-, Optic- und Solar Industry. Because of the flexible arrangement and build-up, the etching system μChem is the ideal tool either for industrial or R&D demands. The complete buildup of the system is made of plastics (PP white) to guarantees a maximal resistance against chemical attacks either of acids or bases. Following the German law of environmental protection, the system has a level controlled pan, which can be used for secure storing of chemicals or lab tools. The etching unit μChem is a sufficient wet chemical process tool for all wet chemical process steps needed in the MEMS-, Semicon-, Optic- und Solar Industry. Because of the flexible arrangement and build-up, the etching system μChem is the ideal tool either for industrial or R&D demands. The complete buildup of the system is made of plastics (PP white) to guarantees a maximal resistance against chemical attacks either of acids or bases. Following the German law of environmental protection, the system has a level controlled pan, which can be used for secure storing of chemicals or lab tools. Of course, customized solutions are available after clearing the technical details.Of course, customized solutions are available after clearing the technical details.

    Wafer Sizes:     up to 300mm

    Applications:  MEMS, CMOS, Sensor, PV, R&D or Production Type,

  • µSRD
    SRD for industrial application, customized solutions available....

  • The MOT µSRD is an advanced Spin Rinse Dryer system developed by M-O-T GmbH. The µSRD is a wet process tool designed for cleaning and drying wafers for all batch applications. The stand-alone MOT µSRD is specially designed for easy operation and maintenance. A single cassette of wafers is placed in a stainless steel rotor. The complete buildup of the system is made of plastics (PP white) and guarantees therefore a maximal resistance against chemical attacks either of acids or bases.

    Wafer Sizes:      up to 300mm
    Applications:    Rinse and Drying of Wafer Baskets
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