In order to reduce the installation area, we have achieved mixing unit-less system that stores its functional parts under a single sheet of grating floor panel.
◎Elimination of the mixing device expands the effective area within the clean room. (Achieve Forefront Mixing Unit Size: 600mm×600mm)
◎Reduces stand-by stress of slurry solutions by mixing just prior to supply.
◎ Enables the same slurry concentration to be adjusted at each use point.