ATI Korea Co., Ltd.

Seoul, 
Korea (South)
http://www.atikorea.com
  • Booth: 4759

The new experience for advanced instruments and best service

We have supplied the various advanced products and service for semiconductor industry based on our experience and knowledge of the field in Korea since establish in 1994. We also have developed new technology and product for new demands in customer for a fab and on-line of particle size analyzer, particle identification analyzer and chemical concentration monitor.

Full on‐line chemical concentration monitoring allows real time correction of process composition and therefore stable process control; product consistency is maintained. We provide the leading on-­line chemical concentration monitors for formulated cleans, oxidizers in slurries, and water concentration and control in semi-aqueous photoresist strips. In each case, the use of the SemiChem with either monitor chemical quality or extend bath life. In either case, the use of the product can have a significant improvement of overall process cost of ownership.

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