ECI Technology Inc.

Totowa,  NJ 
United States
http://www.ecitechnology.com
  • Booth: E2263


We Keep Your Chemistry Right

ECI Technology is a trusted developer, manufacturer and global supplier of chemical process control equipment used throughout the semiconductor, advanced wafer-level packaging, PCB, and LEDs industries – qualifying incoming wet chemistry, managing process control of plating bath solutions and wet processes, and monitors and optimizes process solutions for reuse. Continuous monitoring of manufacturing steps to remove particles, contaminants and other critical defects, improves product yield in fabricating advanced integrated circuits.

Built on decades of inorganic and organic chemistry research and critical intellectual property, ECI works with semiconductor manufacturers, OEMs and material suppliers to provide optimized control solutions for new and established processes. ECI has commercialized Cyclic Voltammetric Stripping, Titration and Spectroscopy and other techniques used to analyze organic and inorganic electroplating and electroless-plating bath components. The speed and accuracy of ECI’s measurements permit precise control of bath composition to ensure process optimization and void-free plating.

Products

QUALI-LINE® Chemical Monitoring Systems for Cu and Co are field-proven systems enabling online monitoring and precise control of process baths in HVM manufacturing. Its bath health monitor enables significant cost reduction of electroplating chemical consumables.

QUALI-FILL® LIBRÅ Chemical Monitoring Systems for Advanced Packaging are fully automatic, closed-loop control analyzers for wet process chemical monitoring and intelligent dosing controls for electroplating and electroless packaging applications. LIBRA "K" series systems feature a modular design for analyzing TSV, RDL, Pillar, Bump, and UBM processes.

QualiLab Elite® Plating Bath Analyzer combines CVS, potentiometric titration, and UV-Vis spectroscopy-based analytical techniques in a single lab instrument and supports multi-language operations.  All models offer high precision selectivity and analysis with a wide range of automation options. Combined with easy-to-use software, advanced reporting and data handling features along with ECI’s proprietary Chempacks® analytical recipes this system matches the requirements for today’s laboratories.

QualiSURF® Wet Process Chemical Monitoring Systems are fully automated chemical process control systems, configurable for advanced cleaning and etching applications. QualiSurf® analyzers provide customized metrology for proprietary applications and are designed to control advanced cleaning chemistries with multiple species.

ECI works with distribution and service partner WESI Technology to serve the greater China markets with offices in Shanghai and Hsinchu, and affiliated offices throughout Mainland China and Taiwan.


 Products

  • QUALI-LINE®
    QUALI-LINE® Chemical Monitoring Systems for Cu and Co plating....

  • QUALI-LINE® Chemical Monitoring Systems for Cu and Co are field-proven systems enabling online monitoring and precise control of process baths in HVM manufacturing. Its bath health monitor enables significant cost reduction of electroplating chemical consumables.
    QUALI-LINE®铜和钴化学监测系统是经现场验证的系统,能够在线监测和精确控制HVM制造过程中的工艺槽。它的镀液健康监测功使得电镀化学消耗品的成本大大降低。            
    • Best Performance

    Accuracy / Repeatability: 4% / 3% *

    • Time of analysis <25 minutes*
    • Expanded Capability

    > 50% increase in process space expanding analytical capabilities

    Predictive maintenance using new Analyzer Health Monitor (AHM)

    Independent Bath Health Monitor for yield improvement

    • Significant reduction of CoO

    ASG, Automatic Standard Generator

    The Precision Series – New Syringe / MVP Modules / PDP

    • Latest electronics hardware and software

    (* Chemistry Dependent)

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