Advanced Micro-Fabrication Equipment Inc. China

Pudong, Shanghai, 
China
http://www.amec-inc.com
  • Booth: 2301


Welcome to visit AMEC booth, N2 hall 2301

Advanced Micro-Fabrication Equipment Inc. China (AMEC, stock code: 688012) is an innovative global micro-fabrication equipment company serving customers in the semiconductor industry and adjacent high-tech sectors. We provide state-of-the-art equipment, process expertise, and stellar support to customers in front-end semiconductor manufacturing, back-end wafer level packaging, LED production, MEMS applications, and other semiconductor fabrication processes.  AMEC is an entrenched supplier of dielectric and TSV etch tools, helping chipmakers build devices at process nodes as low as 5nm.  In addition, AMEC’s MOCVD tools are deployed in volume production by leading global manufacturers of LEDs and power devices with a dominant position in GaN LED MOCVD market. AMEC products are used today by technology leaders in Chinese mainland and Taiwan region, Singapore, Korea, Germany, Italy and Russia.

To learn more about AMEC, please visit www.amec-inc.com.

 Products

  • Dielectric Etcher
    AMEC specializes in dry etch (plasma) systems that are used to build and define the microscopic circuits on the wafer. Dry etch removes material from the wafer by hitting the surface with ions (usually a plasma of reactive gasses). ...

    • Including ICP etcher and CCP etcher for dielectric and other material etch applications.
    • Configured with common platform compatible with single-station or dual station process modules，providing the capability to integrate up to 6+2 process stations；an innovative solution with a small footprint that offers a high throughput and low cost of ownership.
    • In volume production at leading memory chipmakers and logic chipmakers worldwide for 7nm and 5nm processing nodes.
  • MOCVD Solution for High-Volume LED Production
    MOCVD is the core process technology used to build light-emitting diodes (LEDs) for solid-state lighting applications, as well as power electronics devices....

    • MOCVD is the core process technology used to build light-emitting diodes (LEDs) for solid-state lighting applications, as well as power electronics devices. AMEC has deep expertise in MOCVD technology and launched several generation products that can accommodate up to 4 reactors.

    • Including Prismo D-BLUE ®, Prismo A7®, and Prismo HiT3™ that can accommodate up to 4 reactors.
    • For the production of high-volume LEDs for lighting and display applications, as well as UV LEDs and power devices.
    • Enjoy dominant position in GaN LED MOCVD market.

Categories

204 Equipment, Mems
  • Deep RIE etching; Dry Etching
    • 207 Equipment, Process
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
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