the key research institutions of ICs’ industry in China
Department of Microelectronics Equipment & Technology,Institute of Microelectronics of Chinese Academy of Sciences, has always insisted the purpose of independent innovation and quality first. In the past 20 years, we have undertaken and successfully completed a number of national key scientific and technological projects, and achieved a number of significant research fruits. We have won many national prizes, and have a number of technology patents. The major research:the key technologies of new principle device and technology exploration of innovative equipment; ULSI equipment and technology. The main developed products:multi-function magnetic enhancement reactive ion etcher (RIE/MERIE)?high density plasma etcher (ICP)?sputtering system?PECVD?RF power?spin coater etc. These equipments have been used in the areas of microelectronic, photoelectron and MEMS for a long time by many factories, universities and institute,and have been unanimously praised by our customers.