NIKON CORPORATION

Minato-ku,,  Tokyo 
Japan
http://www.nikon.co.jp/pec
  • Booth: 3625-2

Welcome to Nikon booth !

Today’s lithography systems provide overlay accuracy and throughput capabilities far beyond what was previously thought possible. However, it is real-world, on-product performance that is vital to chipmakers.
Nikon combines a strong history of engineering expertise with superior immersion scanner technology and innovative alignment solutions to deliver exceptional semiconductor manufacturing performance and productivity—now and for the future. Nikon. Delivering Real-world Solutions. We will exhibit ArF imemrsion Scanner NSR-S635E, ArF Scanner NSR-S322F,

KrF Scanner NSR-S220D, i-line scan field Stepper SF155, Alignment Station Litho Booster, Wafer Inspection System OPTISTATION series and  Automatic Macro Inspection System AMI series at Nikon booth.

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