Schunk Xycarb Technology BV

Shanghai,  Pudong 
China
https://www.schunk-xycarbtechnology.com/en/
  • Booth: 1567


Welcome to Schunk Xycarb Technology!

Schunk Xycarb Technology offers an extensive line of high-quality consumable components for wafer manufacturing and processing equipment. Our specialties encompass the whole range of consumable components required for Semiconductor, Optoelectronics & crystal growing applications. SXT's high performance products are used in the main platforms for MOCVD, EPI, RTP, Etch, CVD, PVD, Silicon growing and Solar. Specified by major manufacturers of wafer-processing equipment worldwide, our products are also the first choice of wafer and chip manufacturers themselves. Schunk Xycarb Technology brings together the expertise of several specialist companies among which are Schunk Xycarb Technology, Schunk Ingenieurkeramik GmbH and Schunk Kohlenstofftechnik GmbH.

 Products

  • Quartz Chamber Parts
    Quartz chamber parts and reconditioning services for epitaxial processes...

    • For 40 years Schunk Xycarb Technology has demonstrated its strength in reliable quality for all leading system suppliers.

    Through worldwide local repair shops Schunk Xycarb Technology is able to extend product lifetime, reduce cost and improve efficiency.

    Upper Dome

    • Semiconductor
    • EPI
    • Quartz (clear + opaque)
    • High degree of automation enabling consistent process results

    Click here for more information.

  • SiC Coated Wafer Carrier
    SiC coated wafer carrier for LED production...

    • For 40 years Schunk Xycarb Technology has demonstrated its strength in reliable quality for all leading system suppliers.

    Our dedicated engineering team supports to optimize your yield in SiC coated wafer carriers and quartz products.

    In-depth application knowledge helps to enable lifetime enhancement for consumable MOCVD parts.

    Wafer Carrier

    • Opto-electronics
    • SiC coated graphite

    Click here for more information.

  • SiC Coated Susceptors and Rings
    SiC Coated Susceptors and Rings for Epitaxial Processes...

    • For 40 years Schunk Xycarb Technology has demonstrated its strength in reliable quality for all leading system suppliers: 

    • Providing tailored yield optimizations for SiC coated susceptors and quartz chamber products
    • In-depth application knowledge to enable lifetime enhancement for consumable SiC coated graphite and quartz parts plus IR lamps

    Susceptor with Grid

    • Semiconductor
    • EPI
    • SiC coated graphite

    Click here for more information.

Categories

307 Materials, Process
  • Ingots
  • Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)
  • Quartz ware (Silicon Carbide, Fused Quartz Glass, Sapphire), Ceramic & Oxide Ceramic Fixtures
    • 400 Components, Parts & Accessories
  • Lamps (non Lithography), all type UV; LED and other
    • 700 Manufacturing Services
  • Parts Cleaning; Micro Contamination
  • Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
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