EV Group

St. Florian am Inn, 
  • Booth: 2387

Industry Leading Wafer Processing Equipment

关于 E VG

EVG 是世界领先的半导体、微机电系统和纳米技术应用的晶圆加工解决方案供应商。 通过与其全球客户紧密合作,EVG实行灵活的生产模式,开发出了可靠的具备高品质和低购置成本的系统产品,且能够轻松集成入客户的生产线。 其主要产品包括 晶圆键合、光刻 / 纳米压印光刻(NIL)和测量设备,以及涂胶机、清洗机和检测系统等。

除了在晶圆片键合机市场上占有主导份额外, EVG 还在高级封装和微机电系统(MEMS)的纳米压印光刻(NIL)和光刻技术领域占据领先地位。除了这些生产线之外, EVG 推动实施了用于芯片封装和微机电系统(MEMS) / 传感器的、具有成本效益的硅通孔(TSV)工艺。其他相关半导体目标市场还包括硅绝缘体(SOI)、化合物半导体和硅基功率器件的解决方案。

EVG 成立于 1980 年,总部位于奥地利圣弗洛里安市(St. Florian),客户支持网络遍布全球EVG 独创的三 “I” 方法( invent - innovate – implement ,即发明 - 创新 - 实施)在垂直整合的基础上,使得 EVG 能够快速响应各种最新技术趋势,采用最新技术来迎接制造方面的各种挑战,并加快器件的量产。欲知更多信息,请登录 www.EVGroup.com

EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices, and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group services and supports an elaborate network of global customers and partners all over the world. www.EVGroup.com


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