• Booth: T2112

Semco & Cyberstar, French semiconductor tool manufacturer.

ECM Group is founded in 1928 in France, now owned by the Pelissier family as a private company with over 400 staff worldwide. 
Both Semco & Cyberstar are brands under ECM Greentech, where we focus on Semiconductor, Crystal growing, and Renewable Energies furnaces for both R&D and Mass production. Our tools cover Diffusion, PECVD, RTP, and E-Chuck services. We have sold over thousands of APCVD, LPCVD, and patented LYDOP and LYTOX reactors for 4”, 6”, 8” and 12” wafers since almost 40 years. Our tools are up and running in some of the biggest manufacturing fabs in Asia for the past 20 years.

In addition, our expertise on crystal growth custom made equipment for photovoltaic silicon, oxides, fluorides, II-VI, III-V and other exotic materials has strengthen our knowledge on temperature and uniformity control, which is a very important factor when processing materials via high temperature annealing and oxidation, such as SIC.

Our team is capable to provide you the support on fine tuning your furnaces and the right mechanical design for your tool to meet your product specification. We are more than just a tool supplier; we are process experts with integration ability. Therefore, based on our collective experience for producing tools processing temperature range from 300C to 3000C, we are extremely confident to provide you the technology that you need. Our R&D and service team in France and locally in China are aligned to be here at your service with no time zone restriction.

Let''s move forward together to lead the next wave of semiconductor technology!

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