Singulus Technologies AG

Kahl am Main, 
Germany
http://www.singulus.de
  • Booth: 5144


SINGULUS offers equipment for Semiconductor & Photovoltaics

SINGULUS TECHNOLOGIES is a supplier of manufacturing solutions and production equipment for Semiconductor Applications, Photovoltaics, Medical Technology and Data Storage. SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, sensor and other semiconductor applications. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology and wet processing. Already established in the field, SINGULUS TECHNOLOGIES is offering 2 PVD Cluster Tool platforms with the brand name TIMARIS & ROTARIS, comprising a complete portfolio of process modules for different applications. Deposition of Ultra-thin Metallic and Insulating Films down to a Thickness of one Nanometer and below and Stacks of such Films with very Precise Material Thickness and High Uniformity Specifications.

As of today, more than ten process modules are available to configure a TIMARIS system according to customer needs. These modules include the Multi-Target-Module (MTM), Oxidation-Process-Module (OPM), Pre-Clean- Module (PCM), Combi-Process-Module (CPM), Four-Target-Module (FTM) and Static-Deposition- Module (SDM) as well as the Rotating-Substrate- Module (RSM). The RSM is the core module of the ROTARIS platform, our sputtering system for special R&D applications. 

The flexible sputter deposition system ROTARIS is ideal for deposition of multilayers with a very high uniformity and a excellent thickness control. The ROTARIS is a bridge system for 200 mm and 300 mm wafer processing. Its main deposition chamber, the Rotating-Substrate-Module, can be equipped with up to 12 sputtering cathodes with a target diameter of 100 mm. The ROTARIS design provides in particular a rotating substrate deposition technology with the additional capability to tilt the substrate. Additional features are “Co-sputtering” with up to four cathodes, DC-, pulsed DC-, RF-sputtering, wafer heating, and an in-situ aligning magnetic field. The installation of an ion source as alternative equipment allows for surface treatment and smoothing, ion milling and side wall cleaning. 

SINGULUS TECHNOLOGIES SHANGHAI
Contact: Greens Pan
Phone.: +86 13822138376
Email: greens.pan@singulus.com.cn

 Press Releases

  • SINGULUS TECHNOLOGIES Receives Order for Vacuum Coating Machine for Mobile Technology

    SINGULUS TECHNOLOGIES has received an order for the delivery of an inline sputtering machine of the GENERIS PVD type from a company in Taiwan. The ordered machine is intended for the application of layers as part of transmission units in mobile communication technology.

    Dr.-Ing. Stefan Rinck, CEO of SINGULUS TECHNOLOGIES, comments: “With this order we are opening up an additional interesting application area for our innovative vacuum coating technology. In particular the market for mobile communication technology offers interesting growth opportunities.”

    SINGULUS TECHNOLOGIES has delivered more than 8000 vacuum coating machines worldwide. SINGULUS TECHNOLOGIES’ vacuum coating machines are installed at numerous customers all over the world and meet all of the key requirements of innovative coating technology in an ideal way. The GENERIS PVD ensures a high degree of uniformity of the layer thickness with layer reproducibility, high productivity and at the same time very low operating expenses.

    SINGULUS TECHNOLOGIES - Innovations for New Technologies
    SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient and resource-saving production processes, which are used worldwide in the solar, semiconductor, medical technology as well as consumer goods and data storage sectors.

  • SINGULUS TECHNOLOGIES receives order from globally leading Semiconductor Foundry for novel application

    Kahl am Main, October 12, 2020. - The semiconductor division of SINGULUS TECHNOLOGIES AG (SINGULUS TECHNOLOGIES) was awarded an order for a TIMARIS type cluster tool for vacuum deposition on 300 mm wafers. The order in a mid-single-digit range was placed by one of the largest semiconductor foundries of the world and is intended for mass production of integrated inductors.

    “We are pleased to convince an additional leading semiconductor foundry with our TIMARIS vacuum deposition platform. Paramount this success was our competence in process development, reliability and productivity of our cluster tools in a state-of-the-art 300 mm Fab”, comments Dr. Stefan Rinck, CEO of SINGULUS TECHNOLOGIES.

    Integrated inductors enable highly-integrated voltage regulators. Thin-film transformers convert higher supply voltages to lower operating voltages directly in the chip/package. This has two primary benefits: The considerably smaller footprint allows higher integration in mobile devices. Datacenter benefit from reduced ohmic losses as transformation to higher current takes place at the consumer. SINGULUS TECHNOLOGIES thus enables further integration in the semiconductor industry and the reduction of energy consumption.

    The vacuum deposition cluster tools of the TIMARIS type have modular design and can be equipped with various deposition and auxiliary modules. Amongst others, they include modules for sputtering, which can be equipped with several cathodes and operate in ultra-high vacuum of 10-9 Torr. Furthermore, they seamlessly integrate into the host system of modern, fully automated 300 mm fabs.

  • SINGULUS TECHNOLOGIES AG (SINGULUS TECHNOLOGIES ) has been awarded a contract from AZUR SPACE, Germany, for a newly developed PECVD coating system (PECVD: plasma enhanced chemical vapour deposition) for the processes involved in the manufacture of gallium arsenide (GaAs) solar cells.

    SINGULUS TECHNOLOGIES employs ICP technology for PECVD coating technology. ICP – inductively coupled plasma – is a method that offers high electron density in conjunction with a high degree of plasma purity. SINGULUS TECHNOLOGIES has developed a new plasma source based on this technology. Using the SINGULUS TECHNOLOGIES ICP source, the coating system applies dielectric layers to the starting material for the GaAs solar cells.

    Dr.-Ing. Stefan Rinck, CEO of SINGULUS TECHNOLOGIES AG, commented: “We are delighted that after lengthy investigations AZUR SPACE has chosen our PECVD plasma source on the strength of its performance. The PECVD coating step is a crucial quality factor for GaAs solar cells.” GaAs solar cells are noted for their especially high efficiency in excess of 30% and are used in aerospace for power generation on satellites.

    AZUR SPACE Solar Power GmbH is the global market leader and a global player in the development and manufacture of multi-junction solar cells for space PV and terrestrial CPV applications. AZUR SPACE uses the PECVD coating system in the manufacture of GaAs solar cells for applications in space.

    SINGULUS TECHNOLOGIES - Innovations for New Technologies
    SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient and resource-saving production processes, which are used worldwide in the solar, semiconductor, medical technology as well as consumer goods and data storage sectors. 

 Products

  • TIMARS - Nano Deposition Cluster Tool Platform
    The TIMARIS cluster tool is dedicated for the deposition of ultra-thin metallic and insulating films down to a thickness of one nanometer and below and stacks of such films with very precise material thickness and high uniformity specifications....

    • The TIMARIS cluster tool is dedicated for the deposition of ultra-thin metallic and insulating films down to a thickness of one nanometer and below and stacks of such films with very precise material thickness and high uniformity specifications. SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, sensor and other semiconductor applications. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology for semiconductor applications. SINGULUS TECHNOLOGIES has already established and qualified the second generation of the TIMARIS PVD Cluster Tool platform in the market and is offering a complete portfolio of process modules for different applications.

    As of today, more than ten process modules are available to configure a TIMARIS system according to customer needs. These modules include the Multi-Target-Module, Oxidation-Process-Module, Pre-Clean-Module, Combi-Process-Module, Four-Target-Module and Static-Deposition-Module as well as the Rotating-Substrate-Module. The Rotating-Substrate-Module is the core module of the ROTARIS platform, our sputtering system with a high flexibility including co-sputtering. The TIMARIS PVD modules incorporate the full scope of sputtering techniques as: DC magnetron sputtering, pulsed DC magnetron sputtering and RF magnetron sputtering as well as combinations of these modes are selectable by recipe.

    Advantages

    • Up to 10 Targets in one deposition chamber
    • High throughput for multilayer deposition with short change time between the materials
    • Outstanding homogeneity due to the patented Linear Dynamic Deposition (Patent US 7,799,179)
    • Excellent Sub-Å thickness control with high repeatability
    • Very long target life with optimised coating efficiency
    • Low cost of ownership
    • Qualified processes for production
  • ROTARIS Universal Sputtering System
    The flexible sputter deposition system ROTARIS is ideal for deposition of multilayers with a very high uniformity and a excellent thickness control....

    • SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, sensor and other semiconductor applications.

    The flexible sputter deposition system ROTARIS is ideal for deposition of multilayers with a very high uniformity and a excellent thickness control. The ROTARIS is a bridge system for 200 mm and 300 mm wafer processing. Its main deposition chamber, the Rotating-Substrate-Module, can be equipped with up to 12 sputtering cathodes with a target diameter of 100 mm.

    The ROTARIS design provides in particular a rotating substrate deposition technology with the additional capability to tilt the substrate. Additional features are “Co-sputtering” with up to four cathodes, DC-, pulsed DC-, RF-sputtering, wafer heating, and an in-situ aligning magnetic field. The installation of an ion source as alternative equipment allows for surface treatment and smoothing, ion milling and side wall cleaning.

    Advantages

    • High flexibility due up to 12 Targets in one deposition chamber
    • High throughput for multilayer deposition with short change time between the materials
    • Outstanding homogeneity
    • Excellent Sub-Å thickness control with high repeatability
    • Co-Sputtering opportunity with up to 4 cathodes
    • Qualified processes for production
    • Cost efficient solution

    ROTARIS Basic

    ROTARIS Basic sputtering system for processing up to 200 mm wafer.

    Example of configuration:

    • 1x Rotating-Substrate-Module RSM
    • 1x Manual wafer load lock

    ROTARIS Advanced

    ROTARIS Advanced sputtering system with additional modules for processing up to 200 mm wafer.

    Example of configuration:

    • 1 x Rotating-Substrate-Module RSM
    • 1 x Combi-Process-Module CMP
    • 1 x MX400 Central-Transport-Module CTM

    ROTARIS Diversity

    ROTARIS Diversity sputtering system with six modules for advanced processing up to 200 mm wafer.

    Example of configuration:

    • 3 x Rotating-Substrate-Module RSM
    • 1 x Combi-Process-Module CMP
    • 1 x Small-Thermal-Process-Module sTPM
    • 1 x MX700 Central-Transport-Module CTM
  • Wet Processing Systems
    The SINGULUS TECHNOLOGIES product range starts with manual wet stations for R&D, semiautomated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying....

    • SINGULUS TECHNOLOGIES develops innovative technologies for efficient production processes. New production technology combined with sustainable processes and the use of novel materials can decouple the use of resources from economic growth in the long-term.

    The SINGULUS TECHNOLOGIES product range starts with manual wet stations for R&D, semiautomated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying. They are able to handle all wet processes in the front-end and back-end production area.

    SINGULUS TECHNOLOGIES also offers new process solution for the cleaning of metal-ceramic components. Metal-ceramic substrates made of silicon nitride have excellent thermal conductivity and excellent mechanical properties. The corresponding components are increasingly being used in high-performance electronics for the field of electromobility (hybrid and electric vehicles).

    Features

    • Up to 200 mm applications (double batch)
    • High uptime
    • Advanced process control
    • Compact footprint – integrated switch boxes
    • Upgradable by common and customized options
    • Tier-1 components (Iwaki, GF, GEMÜ, SMC, Festo, Siemens)
    • Platform executed for international industrial standards (CE, OSHA, UL)
    • Complies with: FM 4910, SEMI S2 and S8, SECS (if requested)
    • Third-party certification and US field labeling available
    • Fast installation and start-up according by modular design


    Range of products

    • Manual wet process stations
    • Semi- and fully automated wet process stations
    • Quartztube- and part-cleaning stations
    • Total metal free working stations
    • Special customer specified units
    • Chemical supply systems (pump or pressure systems)

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
    • 205 Equipment, Nanotechnology
  • Equipment, Nanotechnology Tools
    • 207 Equipment, Process
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
    • 901 Solar
  • PV Manufacturing Equipment
  • PV Manufacturing Equipment: Cells
  • PV Manufacturing Equipment: Modules
  • PV Manufacturing Equipment: Thin Film
  • PV Manufacturing Equipment: Wafers
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