• Booth: 2104

Welcome to Beneq -- The Home of ALD

Beneq | Home of ALD

Beneq is the home of ALD, offering a wide portfolio of equipment products and development services.

In 1984 we started the world’s first industrial production using atomic layer deposition (ALD).Today, Beneq leads the market with innovative solutions for advanced R&D (TFS 200, R2), flexible high-volume manufacturing (BENEQ TransformTM), ultra-fast high precision spatial ALD coatings (C2R), roll-to-roll thin film coating of continuous webs (WCS 600), and specialized batch production for thicker film stacks (P400, P800).

Headquartered in Espoo, Finland. Beneq is dedicated to making ALD technology accessible for researchers and enabling technology mega trends through engineered ALD materials solutions.

For Technical Support with this webpage, please contact support.