SAWATEC AG

Sax, Swiss,  Switzerland
http://www.sawatec.com
  • Booth: E3170

Overview

Modular machine concept to meet specific needs

SAWATEC offers a comprehensive service package, which can be adapted to your needs. The wide range of application-oriented instruments, systems and components is used for various processing steps along the entire process chain, offering versatile customer benefit:

  • Wafer Clean & Primer: Spin Rinser Dryer, Hotplates
  • Photoresist & Soft Bake: Spin Modules, Spray Coater, Hotplates
  • Post Bake & Develop: Developer, Devloper-Etch, Hotplates
  • Stripping: Developer-Etch
  • Clean & Inspection: Spin Rinser Dryer