1. K-GEN RF Generator is designed to the next level in performance and for highest stability into dynamic loads, used an Integrated RF VIZ sensor for power accuracy and digital based control for fast response times.
2. XpiderTM RF Matching Network Can High Speed & Precise Matching by digitalizing motor operation by Operating High Speed signal Processing for Auto Matching Algorithm.
3. RF VIZTM Sensor is a high performance RF vector sensor providing high accurate measurements of RF and Plasma physical parameters in real-time based on specific DSP & FPGA technology. Providing the optimized RF key information for various & specific RF plasma applications with RFPT own specific calibration approaches.