Reliable Vacuum Technology Since 1968
MEIDEN has been developing and manufacturing highly reliable vacuum capacitors since 1994, utilizing vacuum technology and
know-how we have accumulated through the development and manufacture of vacuum circuit breakers for over half a century.
There are two methods of manufacturing vacuum devices: constant air exhaustion using a vacuum pump and the vacuum sealing at the
manufacturing stage. MEIDEN vacuum capacitors are manufactured using the vacuum sealing method and are designed to maintain the vacuum state for a long period of time.
Main Applications
1. Semiconductor Manufacturing Equipment
Vacuum capacitors (VCs) are an integral part of semiconductor manufacturing processes.
VCs are used in the impedance matching networks which enable physical vapor deposition (PVD), chemical vapor deposition (CVD) and etching.
2. Liquid Crystal Display (LCD) Panel Manufacturing Equipment
VCs are a key component of the impedance matching networks of the radio frequency (RF) generators used to manipulate high-current plasma in order to manufacture LCD panels, such as ‑at screen TVs
3. Photovoltaic Cell Manufacturing Equipment
LCD technology is used for the manufacture of photovoltaic power generating panels (solar cells).
Here too, VCs are incorporated in the impedance matching networkof RF generators for plasma generation.
4. Broadcasting
VCs are used in communications equipment, transmission systems for short and medium wave broadcasting,
aircraft antenna tuners used in harsh environments, and various mobile communications equipment.
5. Medical Care and Measuring Devices
Vacuum capacitors are used in chemical composition analysis and magnetic resonance imaging (MRI)
6. Research
Vacuum capacitors are used in particle accelerators and other fundamental science research facilities
7. Wireless charging
Vacuum capacitors are used in wireless charging research facilities of electric vehicles and plug-in hybrid vehicles
Features
Vacuum capacitors (VCs) have a significantly lower Equivalent Series Resistance (ESR) than other technologies.
Using high vacuum as the dielectric results in high current and voltage ratings, coupled with low losses, especially when compared
to alternative forms of dielectrics. We offer five series of VCs, ranging in capacitance from 1 pF to 6000 pF, with peak
voltage tolerance ranging from 3 kVp to 40 kVp. Vacuum capacitors are the optimal choice where high voltage, high current and high frequencies intersect.
Structure
Variable vacuum capacitors incorporate movable plate electrodes. The plates move in relation to each other within the vacuum,
using precision screw actuators, which provide excellent accuracy and repeatability. The bellows contains the vacuum, allowing motion without the use of seals.
Since the bellows also carry current, we have engineered our VCs with a variety of internal structures to choose from,
including long-lasting stainless steel bellows or double bellows, to accommodate any current handling and life cycle needs in the industry.
This technology is also used in our high-power vacuum contactors and interrupters,which are used in utility power systems, bullet trains and other high-power infrastructure projects.