HIPURITY

Yongin-si, Gyeonggi-do, Korea (South)
http://www.hipurity.com

Booth: T2425

Home
Products

Products

IGP Series

The IGP-Extention purifiers IHP Quality gas at ambient temperature without power consumption. 2 Different media follow customer's application and additional column is available if increased flowrate is expected. Factory regenration is also available.... More Info Less Info

Easy to use : Serves UHP quality purification with simple connection

Performance : Low ppb level purification(Optionally ppt)

Quality : SUS316L Body, All leak checked, fully tested with APIMS Analyzer

Regenerable : Long lifetime by Factory Regenerable, Certified by APIMS analysis (Except some media)

GASPURI

Heated Getter Purifier... More Info Less Info

Gas Purified	Argon, Helium, Nitrogen, Hydrogen
Impurity Removed	H2O / O2 / CO2 / H2 / CH4 / N2
Outlet Purity	<0.1 ppb
Maximum Flow rate	5 / 50 / 100 / 150 slpm
Maximum Inlet Pressure	10.3barg (~150psig)
Inlet Gas Temperature	0 - 35℃
Outlet Gas Temperature	< 50℃
Gas Purified	Argon, Helium, Nitrogen, Hydrogen

OPEN PATH CRDS

OP-CRDS NH3 Analyzer for Moving FOUP... More Info Less Info

First-ever application of OP-CRDS technology for semiconductor FAB
Real-time monitoring of NH3 contamination fluctuations in Cleanroom atmosphere through direct sampling
Implementation of OHT for FOUP with customized structure to enable real-time tracking of internal contamination movement in the cleanroom
Continuous measurement of EFEM, production equipment, and FAB vulnerable points with optimized equipment size of FOUP.

HIPURITY

Products

Categories

500 Factory Monitoring & Control Systems (FMCS)

HIPURITY

Products

Categories

500 Factory Monitoring & Control Systems (FMCS)

Send Mail