Overview
Hitachi High-Tech has been providing metrology and inspection equipments for advanced semiconductor devices. But not only for the advanced semiconductor devices, Hitachi High Tech has been working on the development of semiconductor metrology, analysis, testing solutions for future SiC power devices, RF communication devices, various compound semiconductors, MEMS, etc.
During the SEMICON China, Hitachi High-Tech will introduce new ''inline Tilt Review SEM'' which is helpful for process tuning of SiC trench etch profile.