AP SYSTEMS CORPORATION

Hwaseong-si, Gyeonggi-do,  Korea (South)
http://www.apsystems.co.kr/eng
  • Booth: T2205

Welcome to AP Systems Corporation

Overview

With continuous and concentrated research and development, we create new values in the semiconductors and display manufacturing equipment fields.

AP Systems entered the semiconductor equipment market based on our accumulated knowhow on equipment control software. Since then, we have expanded into mid to small-sized LCD equipment, semiconductor processing equipment for 300mm wafers, and large-sized LCDs, and are currently leading the fields of ELA (Excimer Laser Annealing), LLO (Laser Lift-Off), and OLED Encapsulation, which are the laser equipment necessary for the production of OLED panels. We will continue to grow as a world-renowned total equipment company through endless development based on Top Spirit, Professional Spirit, and Venture Spirit.


  Products

  • KORONA™ DSC600/DSC200
    The KORONA™ DSC600/DSC200 is a plasma based system removing ‘scum’ after the lithography. The system delivers improvement in contact resistance value from the plating process and implements superior bump shapes....

  • The KORONA™ DSC600/DSC200 is a plasma based system removing ‘scum’ after the lithography. The system delivers improvement in contact resistance value from the plating process and implements superior bump shapes.

    The Descums Plasma process allows changing surface properties from hydrophobic to hydrophilic, improving the adhesion of the metal film in the   subsequent process. Among the Fan-out technologies that have recently become significant in the packaging process, improving surface properties in the RDL Process is essential by the Descum system.
     

    AP Systems field-proven Descum equipment for 8-inch & 12-inch wafers and the PLP (up to 600mm) are currently available.

  • KORONA™ PECVD-En
    The KORONA™ PECVD-En System protects u-OLED devices from moisture and oxygen by the TFE (Thin Film Encapsulation) process....

  • The KORONA™ PECVD-En System protects u-OLED devices from moisture and oxygen by the TFE (Thin Film Encapsulation) process. The ‘Inorganic Single Layer’ and the ‘Organic Layer’ are sequentially stacked to protect the u-OLED device. The KORONA™ PECVD-En system stacks the ‘Inorganic Single Layer’ in the TFE.

    WVTR (Water Vaper Transmission Rate) and Transmittance are both important indicators in the TFE. The KORONA™ PECVD-En System is field-proven in both 8 inch and 12inch high-volume-manufacturing customer facilities.

    AP Systems holds the capability for Research & Development meeting our customers’ needs to manufacture ‘u-OLED’, best suited display for VR headsets.

  • KORONA™ PVD600
    The KORONA™ PVD600 System is a metal deposition Sputter for the flip-chip technology packaging process. A solution for the metallization of both input and output signal transmissions under the bump....

  • The KORONA™ PVD600 System is a metal deposition Sputter for the flip-chip technology packaging process. A solution for the metallization of both input and output signal transmissions under the bump.

    The PVD600 System provides superior thin metal film deposition, by its in-situ process sequence starting with the Multi-Degas chamber (A multi slot chamber capable of ‘out gassing’), the CCP Type Plasma Cleaning Chamber (Eliminates oxide film uniformly) and to the thin metal film (Ti & Cu) deposition chamber.

    Its extended preventive maintenance interval and specifically designed ‘quick back-up’ system lowers maintenance costs, while delivering the highest productivity by its specialized wafer flow sequence and verified pasting process control.

    Apart from the UBM KORONA™ PVD600, the FoPLP Sputter and u-bump metal deposition Sputter for the TSV process are also available. Sputters for the FoWLP will be ready at 2023.

  • KORONA™-RTP
    The KORONA™-RTP (Rapid Thermal Process) series is a solution for implant, anneal, spike, and oxidation. Exposing wafers at high temperatures in a short period of time, the Rapid Thermal Process significantly reduces thermal budgets using halogen lamps....

  • The KORONA™-RTP (Rapid Thermal Process) series is a solution for implant, anneal, spike, and oxidation. Exposing wafers at high temperatures in a short period of time, the Rapid Thermal Process significantly reduces thermal budgets using halogen lamps.

    AP Systems KORONA™-RTP series provides excellent temperature uniformity, wafer rotation, radiation compensation, and intelligent temperature control. In addition, its in-house developed software allows optimizations according to the customers preference.

    The KORONA™-RTP series has an installation base of more than 150 systems in Samsung Electronics, the World’s No.1 DRAM/NAND manufacturer. Based on its field-proven background, it has successfully entered overseas markets starting with China since 2020.

    Platforms for both Atmospheric and Vacuum are available, consisting 2~3 chambers per unit. Modular chamber configurations are also available.