Overview
Modular machine concept to meet specific needs
SAWATEC offers a comprehensive service package, which can be adapted to your needs. The wide range of application-oriented instruments, systems and components is used for various processing steps along the entire process chain, offering versatile customer benefit:
- Wafer Clean & Primer: Spin Rinser Dryer, Hotplates
- Photoresist & Soft Bake: Spin Modules, Spray Coater, Hotplates
- Post Bake & Develop: Developer, Devloper-Etch, Hotplates
- Stripping: Developer-Etch
- Clean & Inspection: Spin Rinser Dryer