SINGULUS offers equipment for Semiconductor & Photovoltaics
Overview
SINGULUS TECHNOLOGIES is a supplier of manufacturing solutions and production equipment for Semiconductor Applications, Photovoltaics, Medical Technology and Data Storage. SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced thin-film deposition equipment for MRAM, thin-film head, sensor and other semiconductor applications. It is the trusted partner in the respective industry and extends its leadership in the thin-film deposition technology and wet processing. Already established in the field, SINGULUS TECHNOLOGIES is offering 2 PVD Cluster Tool platforms with the brand name TIMARIS & ROTARIS, comprising a complete portfolio of process modules for different applications. Deposition of Ultra-thin Metallic and Insulating Films down to a Thickness of one Nanometer and below and Stacks of such Films with very Precise Material Thickness and High Uniformity Specifications.
As of today, more than ten process modules are available to configure a TIMARIS system according to customer needs. These modules include the Multi-Target-Module (MTM), Oxidation-Process-Module (OPM), Pre-Clean- Module (PCM), Combi-Process-Module (CPM), Four-Target-Module (FTM) and Static-Deposition- Module (SDM) as well as the Rotating-Substrate- Module (RSM). The RSM is the core module of the ROTARIS platform, our sputtering system for special R&D applications.
The flexible sputter deposition system ROTARIS is ideal for deposition of multilayers with a very high uniformity and a excellent thickness control. The ROTARIS is a bridge system for 200 mm and 300 mm wafer processing. Its main deposition chamber, the Rotating-Substrate-Module, can be equipped with up to 12 sputtering cathodes with a target diameter of 100 mm. The ROTARIS design provides in particular a rotating substrate deposition technology with the additional capability to tilt the substrate. Additional features are “Co-sputtering” with up to four cathodes, DC-, pulsed DC-, RF-sputtering, wafer heating, and an in-situ aligning magnetic field. The installation of an ion source as alternative equipment allows for surface treatment and smoothing, ion milling and side wall cleaning.