阿德特克等离子技术（苏州）有限公司

苏州, 江苏
China
http://www.adtec-rf.co.jp

Booth: T3214

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Overview

公司名：ADTEC Plasma Technology Co.,Ltd.
成立：1985年1月
资金：835,598,501日币
公司代表：董事长森下秀法
总公司所在地：〒721-0942 广岛县福山市引野町5丁目6-10
TEL : +81-84-945-1359
FAX : +81-84-945-1440
主营业务：用于安装在液晶基板和半导体制造过程中使用的制造设备上的高周波射频电源，自动匹配抗阻装置和测量仪器的设计，制造，销售和技术服务。
主打产品：高周波射频电源，自动匹配阻抗装置，RF POWER检测仪
ISO认证：ISO9001:2015取得认证

Products

RF Plasma Generators

• Highly durable and reliable design to withstand high reflection • Cost saving model is available • Latest CPU installed (Faster response) • New communication methods supported (EtherCAT compatible)... More Info Less Info

TXR/TXL/TXM/TXH series

•Latest CPU installed(Faster response)

•New communication methods supported(EtherCAT compatible)

•Available:300W-

Automatic Impedance Matching Box AMVG series

*Automatic high speed matching is possible *Monitoring of chamber impedance on Smith Chart *Real-time display of forward-/reflected-waves,and power,etc.with dedicated software... More Info Less Info

Product Features

*Automatic high speed matching is possible

*Equipped with AMV software as standard that is operable and measurable via a PC

*Built-in standard library for preset and LC network

*Open to customization according to user requirements(I/F,external size,matching range)

Microwaves

*Compatible with equipment for plasma process systems *It can be installed in various environments since it is not affected by exhaust heat from high-voltage power supply and oscillator.... More Info Less Info

Features
Compatible with equipment for plasma process systems
High-voltage Power supply and Oscillator Weight reduction
Use a low drift magnetron
RS485 (Standard equipment) for devices and Microwave power supply control
Compatible with other digital communications
It can be installed in various environments since it is not affected by exhaust heat from high-voltage power supply and oscillator
Built-in isolator (transmitter + isolator integrated)