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Overview
In-line Wet Chemistry and Wafer Temperature Monitoring
Overview
CI Semi, a division of CI Systems Ltd, develops, manufactures and markets process monitoring systems for the semiconductor, solar PV, LED and FPD markets. Active in the semiconductor process equipment market since 1992, CI offers wet process concentration monitors and non-contact wafer temperature monitors to OEMs and to end users.
CI’s family of wet process analyzers (WetSpec line) offers accurate, reliable and cost effective solutions for in-line wet chemistry monitoring. These range from conductivity and NDIR solutions for concentration measurement of simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions.
CI’s family of non-contact temperature monitors (NTM line) incorporates real-time, smart pyrometers with same point emissivity measurement and compensation, making them the ideal solution for accurate, in situ temperature monitoring.