Evatec AG

Trübbach,  Switzerland
http://www.evatecnet.com
  • Booth: 3251

Welcome to the Thin Film Powerhouse.

Overview

Evatec offers complete solutions for thin film deposition and etch in the Advanced Packaging, Power Devices, Fronted, MEMS, Wireless, Optoelectronics and Photonics markets. Our technology portfolio includes a range of advanced sputter technologies, plasma deposition & etch as well as standard and enhanced evaporation. From the bright LEDs in our cars to the sensors and filters in our mobile phones, our expertise enables the world's leading manufacturers to provide solutions for autonomous driving, wearable technologies and devices, and high-performance 5G mobile networks.

From the sputter deposition of next generation AlScN piezoelectric materials enabling 5G on CLUSTERLINE® to new clustered high throughput metallization solutions on 6 and 8 inch in our Multi BAK (BAK 941) Evaporators, visit our booth to find out how our production tools can help you solve your production challenges.

Visit the booth to learn about our new generation HEXAGON tool, designed for Wafer Level Packaging applications to give the lowest Rc values and the best cost of ownesrhip in the industry. Within Optoelectronics drive down your costs for deposition of ITO, mirrors and contacts in production of LED, VCSEL and Micro Display using the latest developments on our CLUSTERLINE®  200 BPM that enhance uniformity, drive down particles and enhance throughput. 


Our team is ready to offer process advice, sampling services and custom engineering to meet our customers individual needs in platforms from R&D to prototyping and true mass production. We provide sales and service through our global network of local offices.
For more information, please visit www.evatecnet.com or come to our E3251 to speak to our experts. We look forward to seeing you!

Follow us on:
LinkedIn: https://www.linkedin.com/company/2793497
Youtube: https://www.youtube.com/@evatecag3161


  Products

  • CLUSTERLINE® 200BPM
    Leading the way in reducing particle levels for optical coatings. Want to improve process accuracy and repeatability? Want to reduce particles? Then contact us!...

  • Leading the way in reducing particle levels for optical coatings. Want to improve process accuracy and repeatability? Want to reduce particles? Then contact us!
  • HEXAGON
    Process 300 or 200 mm substrates with highest throughput achieving lowest Rc in the industry. HEXAGON is the production platform that puts you ahead in UBM, RDL and Fanout....

  • System design for the lowest Rc in the industry 

    HEXAGON is a dedicated wafer level packaging platform for volume production in applications like FOWLP at the lowest cost of ownership offering atmospheric pressure degas, etch and metal deposition. 

    • Processing of highly outgassing organic passivated wafers 
    • Atmospheric frontend handling with a high-performance dual end effector robot for the shortest wafer swap times 
    • Wafer transfer by synchronous indexer enables high speed wafer processing 
    • Etch shield kit lifetimes of > 20000 wafers with enhanced uptime and reduced maintenance 
    • Footprint less than 11 square metres (without control racks) 
    • System design for lowest Rc in the industry and best wafer to wafer repeatability 

  • CLUSTERLINE® FAMILY
    A flexible family of 200mm and 300mm cluster tools...

  • CLUSTERLINE® are a family of platforms named according to their substrate size capability. All platforms share cluster architecture with cassette-to-cassette processing and fully automated handling. Production solutions on CLUSTERLINE® cross all 6 Evatec core markets.

    Whatever your application, our specialists can help you configure an ideal CLUSTERLINE® platform for you. We deliver complete process solutions including highly aligned magnetic films, high performance piezoelectrics like AlScN for broadband RF filters and highly efficient energy harvesting devices, high aspect ratio TSV metallization in Advanced Packaging or precise deposition of TCOs and multilayer dielectrics for the latest micro LED and 3D filter technologies.

    For more information please see our product broschure here or come to our booth E3251 to get the support from our experts!