FA Software (Shanghai) Co., Ltd

myCIM is a comprehensive MES solution with excellent flexibility and scalability, is the first semiconductor industry MES with full independent intellectual property rights, but also one of the most advanced MES products in China. MyCIM's modular design can be combined with different industries and customer needs to meet the needs of customers, resulting in maximum input-output ratios.

After more than 20 years of iteration, myCIM evolved from the original version 1.0 to the latest version 4.0, which supports the production of fully automated FAB plants and a 12-inch chip production line, achieving the high flexibility and personalized production model required by Industry 4.0.

FA SPC supports both counting and metered SPC control charts, including, but not limited to: counting mean-extreme control chart (XBar-R chart)/average-standard deviation control chart (XBar-S chart), single-value-moving extreme control chart (X-MR chart), metered nonconformity rate control chart (P chart), nonconformity number of product charts (NP charts), defect control charts (C charts), unit defect control charts (U charts), and other SPC charts (e.g. Box Plot, Histogram, Scatter, Pareto, Normal Risky Plot, etc.), while FA SPC can take measures such as alarms, sendmails to relevant departments, Hold Lot, Hold Equipment, etc.

In terms of SPC monitoring rules, FA SPC supports user-defined SPC Rules in addition to universal Western Electric Rules and Nelson Rules.

By introducing FA EAP, it is possible to reduce the manual operation of the equipment, simplify the operation process, avoid miss-operation, and improve the productivity of the site.

FA EAP can realize automatic TrackIn and TrackOut operations in MES; it can automatically detect whether MES Recipe matches the equipment, and automatically download the recipe to the machine remotely; it can automatically send information such as Lot ID, number of wafer, and Slot ID to the equipment; can automatically control equipment, automatically collect machine parameters, automatically collect machine status, etc.

It can effectively store, manage and control the content of the equipment’s recipe and its recipe body. By combining with FA EAP (or other EAP systems) and myCIM (or other MES systems), automatic recipe selection, automatic loading, and automatic verification can be realized, which can greatly reduce the probability of incorrect recipes used in the production process. This reduces the operator’s work intensity.

FA RMS has been adopted by many customers domestically and abroad, and has been successfully applied.

As the wafer size increases and the critical dimensions continue to shrink, real-time quality control in semiconductor manufacturing processes becomes increasingly important, placing more stringent process control requirements on semiconductor manufacturers than ever before. For 8-inch and 12-inch wafer fabs, the previous statistical process control (SPC) cannot meet current quality control requirements, making advanced process control (APC) an indispensable key system.

FA APC is designed to collect historical data related to products, processes, equipment, technology platforms, and so on, and adjust the parameters of production process recipes in real time to  control process quality and improve product yield.