EVIDENT (Shanghai) Co., Ltd.

Experiencing the Advantages of a Laser Microscope, the users can realize submicron 3D observation and measurement, ISO25178-complaint surface roughness measurement with a non-contact, non-destructive and fast operation. With the Experiment Total Assist Application and Smart Lens Advisor, the user can quickly create a simpler experiment plan and easily choose the right objective lens for roughness measurement.

The LEXT OLS5100 microscope has two optical systems— color imaging and laser confocal—that enable it to acquire color and shape information as well as high-definition images. The color imaging optics acquire information using a whitelight LED light source and CMOS image sensor. The laser confocal optics acquire confocal images using a 405 nm laser diode light source and a high-sensitivity photomultiplier. The shallow depth of focus enables it to measure a sample’s surface irregularities. The laser confocal optical system receives only the light focused through the circular pinhole, rather than capturing all the light reflected and scattered from the sample. This helps eliminate blur, making it possible to acquire an image with higher contrast than can be obtained with an ordinary microscope.

Evident guarantees the accuracy and repeatability of the microscope based on a traceable system so that you can be confident in your measurement results. To make sure you get the performance you need, our engineers assemble, adjust, and calibrate the microscope in your facility where it’s going to be used. The calibration certificate and examination results are issued only after the microscope is installed, so you can use the system with confidence.

With macro to micro versatility, the microscope’s 23X to 8220X magnification range enables you to conduct high-level, low-magnification overview observations and seamlessly zoom down to the micron level for detailed analysis.

The depth of field and a long working distance give you the flexibility to inspect larger samples, while the free-angle observation system enables you to image your sample from many directions. Our lineup of 17 objective lenses, including super long working distance and high numerical aperture options, provides the flexibility to obtain a wide range of images.

The DSX1000 microscope offers flexibility to make your inspection workflow faster and easier. Replacing lenses on a conventional optical microscope can be cumbersome, and some illumination methods may not be supported. In DSX1000, changing observation is as simple as turning a dial while switching between six observation methods requires only the push of a button. And the multi-preview function shows your sample under multiple observation methods, making it easier to detect defective parts.

The microscope's telecentric optical system enables you to obtain very precise measurements, while the guaranteed accuracy and precision enable you to be confident in your results. When you purchase a DSX1000 system, the calibration will be done by a technician at your site to guarantee the same level of precision as it was shipped from the factory.

The AL120 + MX63L system is an integrated solution with precision flexibility, reliability in both macro and micro inspection.

Regarding flexibility, the system can handle multiple wafer size, including 4’, 5’, 6’, 8’ and 12’, and be compatible with thickness down to 90um to be safely transferred and inspected. The AL120 emphasizes usability through features including fully customizable Inspection mode and device design that takes into account operability tailored for exclusive use in back-end process. The AL120 allows safety and automated micro inspection of 300 mm wafers, with keeping the high level of reliability and safety provided in the AL120 series. What’s more, the AL120 provides you easy operation and high visibility with the optimized position for macro inspection and the friendly control panel.

The MX63 and MX63L microscope systems offer quality observations for up to 300 mm wafers, flat panel displays, printed circuit boards, and other large samples, meeting the needs of the electronics industry.  These ergonomic and user-friendly systems feature a modular design, enabling optimal observation conditions in diverse applications. When combined with Preciv image analysis software, the inspection workflow is simplified and streamlined, from observation to report generation. Our proven optics and exceptional imaging technology deliver clear images and reliable inspections and Users can customize their system with the components that suit their application.

1，Advanced Options for System Design and Automation

①Versatile directional darkfield

The MIX slider realizes darkfield without large, dedicated optics and enhances traditional darkfield with selectable quadrant LED illumination, enabling you to control the direction of light shining on the sample

②Wide variety of revolving nosepiece

Olympus has proven performance with the U-D5BDREMC and U-D6BDREMC five- and six-position motorized revolving nosepieces. Now the U-D5BDREMC-VA class 1 clean room compatible motorized revolving nosepieces removes dust and other particles using a vacuum. Manual, coded, and centerable revolving nosepieces as well as adaptors for a single objective lens can be configured into BXC assemblies

Active autofocus

In the BXC-FSU autofocus unit, the Class 1* laser uses active multispot sensing to monitor the direction of the focal position and focus status. This sensor works well for low-contrast samples like bare wafers. A unique algorithm outputs a stable focus signal regardless of the objective lens magnification and noise caused by peripheral light. The signals are digitally output to the host computer so that your software can read the signals. The signals can be programmed** to move the host instrument’s Z-axis drive.

2，Fast, Easy System Integration

The BXC-CBRML and BXC-CBB control boxes have a small footprint, no fan, and variable mounting options (e.g., wall or ceiling). Depending on the control box, functions like the MIX slider, illuminator, motorized revolving nosepiece, and LED light source can be integrated and controlled using your software.