Jiangsu Leuven Instruments Co., Ltd

Pizhou, Jiangsu
China
http://www.leuven-instruments.cn

Booth: 4617

Overview

鲁汶仪器致力于为12英寸及8英寸集成电路制造线提供先进的装备和工艺解决方案。针对逻辑、存储、功率器件、光学、微显示等领域的关键工艺道次，鲁汶仪器研发了一系列12英寸及8英寸等离子体刻蚀系统、薄膜沉积系统，以及气相分解金属沾污收集系统（VPD），为客户提升产能、优化工艺提供稳定可靠的设备与完善的技术支持。

Categories

204 Equipment, Mems

Deep RIE etching; Dry Etching

207 Equipment, Process

Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD

Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment

Etching; Stripping; Ashing - Dry and Wet Equipment

Ion; E-Beam Milling Etching Equipment

305 Materials, Nanotechnology

Materials, Nanotechnology

601 Design Software

EDA - Electronic Design Automation; Circuit Design