Marposs Group is providing worldwide precision metrology equipment for use in workshop environment during and after machining operations. Since 1980 Marposs has designed and installed applications dedicated to semiconductor and LED industry gaining the trust of OEMs deeply involved in improving the reliability and performance of wafer fabrication process. Marposs Group offers gauges and sensors to improve the different operations, from ingot slicing through final packaging. Marposs products are designed to improve and control the quality of the wafer before, during and after key operations

1.Sensors for wafer processing

Marposs provides thickness, force, torque, vibration, acceleration, true power, coolant flow and acoustic sensors that can improve the machine reliability and help in assuring a constant and high quality production. These sensors have been designed to properly work inside a machine and thanks to dedicated signal elaboration immediately detect events or changes in the machine environment. Here are some specific used of Marposs solutions

STIL Sensors for automatic m a c h i n e t o c o n t r o l force, torque, vibration, acceleration, true power and coolant flow. Acoustic sensor can be used for diamond wire breakage detection on ingot slicing machines and for wheel dressing control on grinding machine

2.Metrology and surface inspection

Marposs and STIL sensors cover a wide range of applications starting from thickness, TTV, bow, warp measure tiil a complete 2D image and 3D topoghrapy.

STIL CCS single point confocal sensor for distance and shape measurement. STIL MPLS confocal line sensor for fast 3D micro/nano-topography

NCG interferometric gauges have been designed to be flexible and easy to use. Every single unit can be connected in a network of sensors controlled by a machine. Dedicated elaborations are available to measure both very reflective, rough or opaque parts. Thanks to its improved electronics it is possible in run time to execute measure and store hours of continuous data that can then be used for a post-process elaboration, quality control and machine performance evaluation.

Our gauges are designed to improve and maintain machine cycle times, quality of the final product and to control the process before, during or after key operation steps. Marposs NCG is a high-speed elaboration gauge that can be connected to any machine for accurate and fast part thickness control. It could be used on a fixture or inside a machine, in dry or wet environments within the limits specified in the technical data.

NCG infrared technology helps in detecting single or multi-layers thickness even on rough or opaque materials.

NCG non contact sensor for an absolute wafer thickness measurement inside a machine tool or during the wafer thinning of lapping operations.