Semicaps Pte Ltd

Singapore,  Singapore
http://www.semicaps.com
  • Booth: 2655

Failure Analysis & Fault Isolation, probing 3nm tech node.

Overview

SEMICAPS is the world’s leading company in high resolution infra-red laser scanning microscopes for the semiconductor field. These microscopes are used by advanced semiconductor companies for:

a) design-debug analysis of new integrated circuits (ICs),
b) yield improvement analysis for early semiconductor wafers, and
c) failure analysis of customer returns.

Currently, SEMICAPS equipment has the best resolution in the world with the ability to resolve linewidths below 70nm. This allows our equipment to be used currently on the 3nm, 5nm and 7nm technology node and beyond by leading customers in the semiconductor field. On top of that, our SEMICAPS 5000 is the only wafer prober in the field that allow hard-docking and direct-probing with standard commercial testing equipment; catering for probe-cards of over 10,000 pins and testing speeds of more than 1 Gbps. All these are possible through advanced Research and Development in house.

In the design and manufacturing of semiconductors, SEMICAPS equipment provides foundries, design houses and packaging houses with solutions for Electrical Failure Analysis, Fault Isolation and Failure Characterization as our core business. Our tools are usually located within Failure Analysis labs, Quality Analysis labs, Quality Reliability labs, Process and Yield Enhancement facilities, third party FA labs, Government Institutions, Research Labs and Institutes of Higher Learning to name a few.  We sell these globally to leading semiconductor IC companies like Samsung, Qualcomm, AMD, NXP, GlobalFoundries, OnSemiconductor, Skyworks, Micron, Intel, UMC and TSMC as well as Mainland China customers in Beijing, Chengdu, Shenzhen, Shanghai and Wuhan.  Over Half of the top 20 semiconductor companies have bought our equipment.

Our subsidiary, Inscope Labs also provides a wide range of laboratory services using our equipment.

SEMICAPS has its R&D, manufacturing and HQ in Singapore. SEMICAPS has an established reputation in the semiconductor industry for more than 35 years inventing  and commercializing many world's firsts. 


  Products

  • SEMICAPS Scanning Optical Microscopy
    SEMICAPS Scanning Optical Microscopy...

  • SOM

    -Lasers options - 1340 nm/1320 nm/1064 nm with laser scan array size up to 2k x 2k

    - Multiple techniques available:

    static: TIVA, OBIRCH dynamic: LADA, SDL

    - High power delivery 30 mW at DUT for all objectives including 100x

    - Lock-in and Laser Pulsing technique: 10x improvement in sensitivity

    - Pixel by pixel flexible scanning mode with user defined multiple - AOI

    - Modular platform, field-upgradeable to LTP

    - Flexible and customizable

    - Centric and Aplanatic Refractive Solid Immersion lens (RSIL) options

    - Option to mount PEM cameras (InGaAs, TE-cooled, LN2)

  • SEMICAPS Laser Timing Probe
    Non-invasive backside detection of waveforms/logic within a die using a CW laser...

  • LTP

    - Non-invasive backside detection of waveforms/logic within a die using a CW laser

    -FFT Frequency Mapping to quickly trace signal paths inside a die

    - Best-in-class:

    Resolution with Centric and Aplanatic RSILs

    Bandwidth up to 12 GHz

    Test loop lengths up to 1000 ms

    Measure rise times < 40 ps

    - Optional:

    SOM with 1064 nm and 1340 nm lasers

    PEM with ultra low-noise InGaAs camera (LN or TE cooled)

    -Device Thermal Control

  • SEMICAPS Photon Emission and Thermal Microscopy
    PEM Multi Detectors (InGaAs, Cooled-CCD), various array sizes (1k x 1k, 640 x 512, 320 x 256) with cooling options - low noise LN2 or TE cooled (Peltier) THM It is used in Semiconductor Analysis Laboratories for Thermal Imaging to detect hot spot....

  • PEM

    - Multi Detectors (InGaAs, Cooled-CCD), various array sizes (1k x 1k, 640 x 512, 320 x 256) with cooling options - low noise LN2 or TE cooled (Peltier)

    - Dedicated macro lens for high emission sensitivity

    - Modular platform - field upgradeable to SOM and LTP

    - Flexible and customizable

    - Centric and Aplanatic Refractive Solid Immersion lens (RSIL) options

    THM

  • SEMICAPS Product Configurations
    Configurations...

  • SOM 1100, 1300

    - For backside and frontside analysis of wafers, wafer parts and packaged device

    SOM 3000

    - For backside analysis of wafers, wafer parts and packaged devices. Able to dock with all ATE platforms

    SOM 4000

    - Inverted Analytical and Tester-Docked System

    SOM 5000

    - Wafer analysis using a combination of Laser Timing Probe (LTP), Scanning Optical Microscope (SOM) and Photon Emission Microscope (PEM)

  • SEMICAPS Aplanatic Refractive Solid Immersion Lens
    ARSIL The smallest laser spot size on the DUT which gives the best return signal with the lowest noise and lowest cross-talk, used in 3 nm and 5 nm process...

  • ARSIL

    -The smallest laser spot size on the DUT which gives the best return signal with the lowest noise and lowest cross-talk, used in 3 nm and 5 nm process

    - 3.3 NA (<150 nm resolution pitch

    - Best sensitivity and able to run devices at high speed/power

    - SIL option for full backside thickness (750 micron) available

    - Easy sample prep 50 - 100 μm, customizable